In this paper

the problem of friction testing in micro-components is discussed.The experimentation made by Bhushan and Koinkar shows that the coefficients of macro friction and nano friction are different.But in MEMS

the size of the part is several microns

or even greater than that

and the interface area is beyond nano with the load between N and nN. So the MEMS's friction is neither macro friction nor nano one

which should be studied further.But there is no any appropriate instrument to do so because the present instruments are designed for macro or nano friction testing. This paper discusses the force sensor which is used in the instrument for testing the MEMS's friction.The general force sensor's resolving power and sensitivity are too low. And we make the force sensor by MEMS technics

which has many advantages such as low cost

high precision and reliability

low drive and power consume

etc. Finally

the performance of the force sensor is present.