微机械系统建模与仿真技术研究

季国顺; 张永康

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微机械系统建模与仿真技术研究

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- 微机械系统建模与仿真技术研究
- Study of the technology of modeling and simulation of MEMS
- 光学精密工程 2002年10卷第6期页码：626-631
- 作者机构：
  
  江苏大学, 机械工程学院,江苏镇江,212013
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TH128
- 收稿日期：2002-08-17，
  
  修回日期：2002-10-17，
  
  网络出版日期：2002-12-15，
  
  纸质出版日期：2002-12-15
- 稿件说明：
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季国顺, 张永康. 微机械系统建模与仿真技术研究[J]. 光学精密工程, 2002,(6): 626-631

JI Guo-shun, ZHANG Yong-kang. Study of the technology of modeling and simulation of MEMS[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 626-631
季国顺, 张永康. 微机械系统建模与仿真技术研究[J]. 光学精密工程, 2002,(6): 626-631 DOI：

JI Guo-shun, ZHANG Yong-kang. Study of the technology of modeling and simulation of MEMS[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 626-631 DOI：

摘要

简要分析了微电子机械系统建模仿真的原因

指出了微电子机械建模仿真需要克服的四个方面技术难题

即尺度效应、开发快速的表面力计算方法、多物理场耦合分析、宏模型的建立

为微电子机械系统的建模仿真指明了研究方向.详细分析了微电子机械系统建模仿真的技术关键

多物理场耦合计算的理论方法和器件及系统宏观模型的建立

介绍了用于MEMS系统级模拟仿真的宏模型建立的几种方法

最后结合硬件描述语言VHDL-AMS提出了建立微电子机械系统模型实现系统级模拟的方法.

Abstract

This paper analyzes the reason for modeling and simulation of MEMS briefly.There are four difficulties i.e.

microscale effect

fast algorithms of surface force

multiple physics fields coupling algorithms

and development of macromodel of MEMS or microdevice in modeling and simulation of MEMS.Their key technologies are analyzed in detail.Several current methodologies of system-level modeling and simulation of MEMS are introduced. The method of modeling MEMS with the aid of VHDL-AMS is finally proposed.

关键词

Keywords

references

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VHDL1076-1k1.htm/#intro[EB/OL].http://www.vhdl-ams.com/microcosm/.

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