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中国科学院长春光学精密机械与物理研究所, 吉林, 长春, 130022
收稿日期:2002-03-17,
修回日期:2002-08-23,
网络出版日期:2002-10-15,
纸质出版日期:2002-10-15
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王延风, 何惠阳, 孙宝玉, 宋文荣, 刘延斌. 全自动金丝球焊机的CAD/CAE设计研究[J]. 光学精密工程, 2002,(5): 466-470
WANG Yan-feng, He Hui-yang, SUN Bao-yu, SONG Wen-rong, LIU Yan-bin. Research on the design of a fully automatic gold wire bonder with CAD/CAE[J]. Editorial Office of Optics and Precision Engineering, 2002,(5): 466-470
王延风, 何惠阳, 孙宝玉, 宋文荣, 刘延斌. 全自动金丝球焊机的CAD/CAE设计研究[J]. 光学精密工程, 2002,(5): 466-470 DOI:
WANG Yan-feng, He Hui-yang, SUN Bao-yu, SONG Wen-rong, LIU Yan-bin. Research on the design of a fully automatic gold wire bonder with CAD/CAE[J]. Editorial Office of Optics and Precision Engineering, 2002,(5): 466-470 DOI:
全自动金丝球焊机是微电子封装设备中的核心设备
它是集精密机械、自动控制、图像识别、计算机应用、光学、超声波焊接等多领域技术于一体的现代高技术微电子生产设备.工作原理是通过X-Y工作台和焊头的三维运动控制
定位并拉出设定的金丝线型
采用超声波热压球焊方法焊接芯片管脚.技术路线是应用光机电一体化技术和采用CAD/CAE技术手段进行研制与开发.超声球焊和高速高精度运动定位技术是关键技术.为使球焊机达到高速高精度焊接的要求
应用CAD/CAE技术对球焊机关键部件X-Y工作台及焊头进行CAD建模的概念设计、有限元力学分析和结构优化设计.
Fully automatic gold wire bonder is the key device of the package equipment for micro-electrons
which is associated with integrating technologies of fine mechanics
automatic control
image recognition
computer application
optics and ultrasonic wave bond. By controling three-dimensional motion of the X-Y table and bond head
precision positioning and desired line-type gold wires can be realized
and an ultrasonic wave bonded method is used. The technology route is to use integrating technologies of optics and mechatronics as well as CAD/CAE to develop new products. Ultrasonic wave bond and precision position at high speed are key technologies. By means of CAD/CAE technology
The solid models of the X-Y table and bond head assembly were built
and based on the solid models
the mechanism simulation was done. By using finite element method(FEM)
the structural analysis will be done for improving design to meet the demand of bonding precision and speed.
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刘品宽,孙立宁,曲东升,等.新型二维纳米级微动工作台的动力学分析[J] . 光学精密工程.2002,10(2): 142-147.
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