Silicon optical MEMS:optical components and sensors

Kazuhiro Hane

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Silicon optical MEMS:optical components and sensors

论文 | 更新时间：2020-08-12

- Silicon optical MEMS:optical components and sensors
- Silicon optical MEMS:optical components and sensors
- 光学精密工程 2002年10卷第6期页码：632-633
- 作者机构：
  
  Dept. Mechatronics and Precision Engineering, Tohoku University, Sendai,Japan,980-8579
- 作者简介：
- 基金信息：
- DOI：
  中图分类号：
- 收稿日期：2002-10-07，
  
  修回日期：2002-10-20，
  
  网络出版日期：2002-12-15，
  
  纸质出版日期：2002-12-15
- 稿件说明：
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Kazuhiro Hane. Silicon optical MEMS:optical components and sensors[J]. 光学精密工程, 2002,(6): 632-633

Kazuhiro Hane. Silicon optical MEMS:optical components and sensors[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 632-633
Kazuhiro Hane. Silicon optical MEMS:optical components and sensors[J]. 光学精密工程, 2002,(6): 632-633 DOI：

Kazuhiro Hane. Silicon optical MEMS:optical components and sensors[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 632-633 DOI：

摘要

Using Micro-Electro-Mechanical System (MEMS)technology

many devices and systems can be miniaturized.M icro pressure sensors and micro accelerometers(air-bag sensor)are examples that are widely commercialized.In the case of optical system

some optical components need to be combined to implement the function desired f or optical processing.A micro-optical bench based on a Si surface and bulk microm achining has been proposed in order to integrate optical components on a Si substrate.

Abstract

Using Micro-Electro-Mechanical System (MEMS)technology

many devices and systems can be miniaturized.M icro pressure sensors and micro accelerometers(air-bag sensor)are examples that are widely commercialized.In the case of optical system

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Keywords

references

Hara K,Hane K,Sasaki M,et al.T r ansducers 99(1999)790_793.

Yamaguchi T,Sasaki M,Hara M,et al.Int.Co nf.O ptical M EM S(2001)7_8.

Hane K,Endo T,Ishimori M,et al.Senso rs and A ctuato rs A,97_98(2002)139_146.

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