Micro-nano electromechanical system by bulk silicon micromachining

Masayoshi Esashi; Takahito Ono+

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Micro-nano electromechanical system by bulk silicon micromachining

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- Micro-nano electromechanical system by bulk silicon micromachining
- Micro-nano electromechanical system by bulk silicon micromachining
- 光学精密工程 2002年10卷第6期页码：608-613
- 作者机构：
  
  New Industry Creation Hatchery Center (NICHe), Tohoku University+ Graduate School of Engineering, Tohoku University Sendai,980-8579
- 作者简介：
- 基金信息：
- DOI：
  中图分类号：
- 收稿日期：2002-10-17，
  
  修回日期：2002-11-16，
  
  网络出版日期：2002-12-15，
  
  纸质出版日期：2002-12-15
- 稿件说明：
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Masayoshi Esashi, Takahito Ono+. Micro-nano electromechanical system by bulk silicon micromachining[J]. 光学精密工程, 2002,(6): 608-613

Masayoshi Esashi, Takahito Ono+. Micro-nano electromechanical system by bulk silicon micromachining[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 608-613
Masayoshi Esashi, Takahito Ono+. Micro-nano electromechanical system by bulk silicon micromachining[J]. 光学精密工程, 2002,(6): 608-613 DOI：

Masayoshi Esashi, Takahito Ono+. Micro-nano electromechanical system by bulk silicon micromachining[J]. Editorial Office of Optics and Precision Engineering, 2002,(6): 608-613 DOI：

摘要

MEMS(Micro ElectroMechanical System)based on semiconductor microfabrication plays im-portant roles for example in the periphery of IT systems.N EMS(Nano Elect roMechanical Sys-tem)contains nano-scale structures.Sop histicated and high performance systems based on the MEMS and the NEMS have been developed.Packaging and elect rical interconnection play an important role in realizing practically applicable systems.

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references

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