Measurement and machining in microfabrication based on radiation pressure control

Yasuhiro TAKAYA; Satoru TAKAHASHI; Takashi MIYOSHI

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Measurement and machining in microfabrication based on radiation pressure control

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- Measurement and machining in microfabrication based on radiation pressure control
- Measurement and machining in microfabrication based on radiation pressure control
- 光学精密工程 2003年11卷第1期页码：22-29
- 作者机构：
  
  Osaka University, 2-1 Yamadaoka, Suita Osaka,JAPAN,565-0871
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TH161
- 收稿日期：2002-01-17，
  
  修回日期：2002-12-09，
  
  网络出版日期：2003-02-15，
  
  纸质出版日期：2003-02-15
- 稿件说明：
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Yasuhiro TAKAYA, Satoru TAKAHASHI, Takashi MIYOSHI. Measurement and machining in microfabrication based on radiation pressure control[J]. 光学精密工程, 2003,(1): 22-29

Yasuhiro TAKAYA, Satoru TAKAHASHI, Takashi MIYOSHI. Measurement and machining in microfabrication based on radiation pressure control[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 22-29
Yasuhiro TAKAYA, Satoru TAKAHASHI, Takashi MIYOSHI. Measurement and machining in microfabrication based on radiation pressure control[J]. 光学精密工程, 2003,(1): 22-29 DOI：

Yasuhiro TAKAYA, Satoru TAKAHASHI, Takashi MIYOSHI. Measurement and machining in microfabrication based on radiation pressure control[J]. Editorial Office of Optics and Precision Engineering, 2003,(1): 22-29 DOI：

摘要

We have been developing new fabrication tools based on optical radiation pressur e and related phenomena to develop aflexible and accurate microfabrication tec hnology. In this paper

the laser trapping probe for the nano-CMM for assessment

in addition to micromachining technique using a small particle controlled by optical radiation pressure and laser aggregation technique are discussed. As the positional detection probe for the nano-CMM

an optically trapped silica particle with 8 mm diameter in forced oscillation state is used. A probe sphere retains a stable position when applied with trapping force by Nd:YAG laser light formed an nu lar and is forced to oscillate by the driving force changed by modulating the in tensity of LD emission. Experintal results show that this vibrational microprobe h as the possibility to achieve positional sensing accuracy of less than 25 nm. As a new micromachining technique

nano-removal process using an optically trapped micro-grain is proposed. The laser trapping force enables not only to stably trap the diamond grain with asymmetrical shape but also to freely control the positi on with spinning. Using this micro machining tool

the machining experiments of h ydrocarbon film are performed. AFM observation confirmed that the fine groove wi th depths of about 3～4 nm can be fabricated. As an additive process based on ra diation pressure

a laser microstructure fabrication using laser agglomeration p h enomena of colloidal particles aided by radiation pressure is investigated. By c ontrolling laser beam scanning in slurry containing KOH solution and SiO

par ticles with a diameter of 140 nm

colloidal particles are aggregated and adhered firmly to a silicon wafer substrate. Using this laser agglomerating process

two-dimensional grid microstructures at the pitch of 5 mm can be fabricated.

Abstract

We have been developing new fabrication tools based on optical radiation pressur e and related phenomena to develop aflexible and accurate microfabrication tec hnology. In this paper

the laser trapping probe for the nano-CMM for assessment

par ticles with a diameter of 140 nm

colloidal particles are aggregated and adhered firmly to a silicon wafer substrate. Using this laser agglomerating process

two-dimensional grid microstructures at the pitch of 5 mm can be fabricated.

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Keywords

references

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