电磁型平面微电机及其制作工艺

郭占社; 吴一辉; 宣明; 王淑荣

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电磁型平面微电机及其制作工艺

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- 电磁型平面微电机及其制作工艺
- Electro-magnetic planar micromotor and its fabrication
- 光学精密工程 2003年11卷第2期页码：120-124
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所, 应用光学国家重点实验室,吉林长春,中国,130033
- 作者简介：
- 基金信息：
  
  国家973资助项目(No.G1999033102)()
- DOI：
  中图分类号： TM359.9
- 收稿日期：2002-12-24，
  
  修回日期：2003-02-15，
  
  网络出版日期：2003-04-15，
  
  纸质出版日期：2003-04-15
- 稿件说明：
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郭占社, 吴一辉, 宣明, 王淑荣. 电磁型平面微电机及其制作工艺[J]. 光学精密工程, 2003,(2): 120-124

GUO Zhan-she, WU Yi-hui, XUAN Ming, WANG Shu-rong. Electro-magnetic planar micromotor and its fabrication[J]. Editorial Office of Optics and Precision Engineering, 2003,(2): 120-124
郭占社, 吴一辉, 宣明, 王淑荣. 电磁型平面微电机及其制作工艺[J]. 光学精密工程, 2003,(2): 120-124 DOI：

GUO Zhan-she, WU Yi-hui, XUAN Ming, WANG Shu-rong. Electro-magnetic planar micromotor and its fabrication[J]. Editorial Office of Optics and Precision Engineering, 2003,(2): 120-124 DOI：

摘要

为得到一种尺寸小、输出力矩大、转速高的直流可调速微电机

提出了一种利用微机械加工工艺制作微电机的方法。定子和转子都做成平面结构

定子线圈采用了平面型、无槽式集中绕组;线圈之间采用了三相星形连接方式

采用了微机械LIGA工艺和硅微机械加工工艺;转子采用钕铁硼永磁材料

进行轴向充磁

成辐射状间隔分布。装配时转子分布于定子两侧

不但减小了电机尺寸

还有利于定子的散热。把装配完毕的微电机接通三相半控控制电路对其转速和力矩进行了测试

测试结果表明

电机运转平稳

输出力矩大。

Abstract

A kind of MEMS technology has been proposed for fabrication of micromotors

which are small in size

high in output torque and rotational speed

and speed controllable. The rotors and stators of the micromotor are all planar

the windings are made planar

grooveless and concentric using the LIGA technology and silicon micromachine technology. They are connected with three-phase stellated NdFeB permanent-magnet material and the rotor is magnetized axially.Two rotors are distributed at both sides of the stator

symmetrically. This kind of structure can not only reduce the axial dimension of the micromotor

but also reduce the convection of rotors and stators to the air. Finally

the assembled micromotor is run by three-phase square wave current. The results show that the micromotor has many advantages

such as stable speed and less ripple in the output torque.

关键词

Keywords

references

张琛.电磁型微电机的发展趋势及我们的对策[J].微特电机,1998,2:24-26.ZHANG CH. The developping tendency of electromotor and our countermeasure[J]. Small and Special Electrical Machines,1998,2:24-26.

张琛,赵小林,杨春生.超微型电动机实用化的关键技术及应用前景[J].上海交通大学学报,2000,34(3):430-432.ZHANG CH, ZHAO X L, YANG CH SH. Crux technology for practically of micro-motor and its application prospect[J].Journal of Shanghai Jiaotong University,2000,34(3):430-432.

梁静秋,姚劲松.端面摇摆式微型电机研究[J].光学精密工程,1999,7(4):76-80.LIANG J Q, YAO J S. Study on top-face-sway micromotor[J].Optics and Precision Engineering,1999,7(4):76-80.(in Chinese)

贾智,王立鼎,梁静秋,等.端面摇摆式微型电磁电机工作原理及运动学分析[J].光学精密工程,1999,7(4):71-75.(in Chinese)JIA ZH, WANG L D, LIANG J Q, et al.Analysis of working principle and kinematics of electromagnetic micromotor with new type of structure[J].Optics and Precision Engineering, 1999,7(4):71-75.(in Chinese)

余晋岳,张琛,杨春生,等.直径1 mm电磁型双定子微马达的结构特点及稀土永磁在其中的应用[J].磁性材料及器件,2000,31(1):15-17.YU J Y, ZHANG CH, YANG CH SH, et al. The structural features of Φ1 mm micro electromagnetic motor with Bi-stators and application of rare-earth permanent magnet in it[J].Journal of Magnetic Materials and Devices,2000,31(1):15-17.

张寿柏,张琛,赵小林.直径为2 mm电磁型微电动机的研究[J].上海交通大学学报,1996,30(9):133-136.ZHANG SH B, ZHANG CH. Research on magnetic micromotor 2 mm in diameter[J]. Journal of Shanghai Jiaotong University,1996,30(9):133-136.

杨春生,赵小林,丁桂甫.电磁型微马达的微转子研究[J].微细加工技术,1999,4:47-50.ZHANG CH SH, ZHAO X L, DING G F. Study on microrotors of micro-electromagnetic motor[J].Microfabrication Technology, 1999,4:47-50.

NIENHAUS M. Design and relization of a penny-shaped micromotor[J]. SPIE,1999,3680B:592-600.

FERNANDEZ V,REYNE G,CUGAT O.Prospective FEM modeling of induction planar micromotors[J].IEEE Transaction onMagnetics,1999,35(3):1805-1808.

WU Y H,JIA H G. Noncontact microtorque measurement for motors in MEMS.IEEE 6th international conference and exhibition on micro electro[A]. Opto Mechanical Systems and Components[C].Germany,1998.

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