基于相移电子莫尔条纹的深度非球面检测

程仕东; 张学军; 张忠玉; 张峰

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基于相移电子莫尔条纹的深度非球面检测

测试技术及设备 | 更新时间：2020-08-12

- 基于相移电子莫尔条纹的深度非球面检测
- Deep aspheric testing based on phase-shift electronic Moir? patterns
- 光学精密工程 2003年11卷第3期页码：250-255
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所,吉林长春,130033
  2. 吉林大学原子分子研究所, 吉林, 长春, 130022
- 作者简介：
- 基金信息：
  
  Parts of the work presented here are supported by NSFCs funding for distinguished yo
- DOI：
  中图分类号： O436.1
- 收稿日期：2002-12-10，
  
  修回日期：2003-03-16，
  
  网络出版日期：2003-06-15，
  
  纸质出版日期：2003-06-15
- 稿件说明：
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程仕东, 张学军, 张忠玉, 张峰. 基于相移电子莫尔条纹的深度非球面检测[J]. 光学精密工程, 2003,(3): 250-255

CHENG Shi-dong, ZHANG Xue-jun, ZHANG Zhong-yu, ZHANG Feng . Deep aspheric testing based on phase-shift electronic Moir? patterns[J]. Editorial Office of Optics and Precision Engineering, 2003,(3): 250-255
程仕东, 张学军, 张忠玉, 张峰. 基于相移电子莫尔条纹的深度非球面检测[J]. 光学精密工程, 2003,(3): 250-255 DOI：

CHENG Shi-dong, ZHANG Xue-jun, ZHANG Zhong-yu, ZHANG Feng . Deep aspheric testing based on phase-shift electronic Moir? patterns[J]. Editorial Office of Optics and Precision Engineering, 2003,(3): 250-255 DOI：

摘要

通过相移技术检测深度非球面波前时

CCD相机和计算机分辨率受到Nyguist频率的限制.基于相互平行相移莫尔条纹干涉技术

我们提出一种新颖有效的检测技术.相互平行的相移电子莫尔条纹是由计算机产生三幅光栅作为参考波前

分别和输入被检干涉图相叠加

并通过低通滤波器滤波滤掉高频而得到的.最后

由三步相移算法

我们得出非球面的面形分布.

Abstract

The resolutions of CCD camera and digital computer are limited by Nyquist frequency whendeep aspheric wavefronts are tested using phase-shifting technique. A new powerful technique basedon parallel generations of three phase-shift patterns through electronic multiplication with computer-generated graftings and low pass filtering

is proposed for measuring wavefronts with large departuresfrom a reference sphere such as those encountered during testing of steep aspheric surfaces. The phasedistribution of aspheric surfaces is obtained using a three-step phase-shifting algorithm.

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references

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MALACARA D. Optical shop testing [M]. Wiley & Son: New York, 1992. 743-744.

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BASTINAANS M J. Wigner distribution moments in fractional Fourier transform systems [J]. Journal of the Optical Society of America A, 2002,19(9) :1706-1710

ZHANG X J. Manufacturing and testing of two off-axis aspherical mirror[J]. SPIE, 2001. 4451: 96-104.

ZHANG X J. Recent progress on asphere manufacturing and testing at CIOM[J]. SPIE, 2000, 4231:24-31.

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