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哈尔滨工业大学, 精密工程研究所, 黑龙江, 哈尔滨, 150001
收稿日期:2002-10-12,
修回日期:2003-01-18,
网络出版日期:2003-04-15,
纸质出版日期:2003-04-15
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夏加飞, 孙涛, 闫永达, 梁迎春, 程凯, 董申. 基于原子力显微镜(AFM)的微加工系统[J]. 光学精密工程, 2003,(2): 125-129
XIA Jia-fei, SUN Tao, YAN Yong-da, LIANG Ying-chun, CHENG Kai, DONG Shen. Micro-machining system based on AFM[J]. Editorial Office of Optics and Precision Engineering, 2003,(2): 125-129
目前原子力显微镜(AFM)已经成为纳米加工领域中一种重要的加工手段
但由于其自身扫描陶管及针尖等因素的影响
AFM的微加工能力在很大程度上受到限制。利用三维微动工作台结合原子力显微镜以及锋利的金刚石针尖组成微加工系统
通过编程获取微结构的轮廓
选择RS-232串口作为通讯方式
发送字符串命令控制工作台的运动实现预定的轨迹
从而消除了扫描陶管运动范围有限且存在漂移和滞后的影响
解决了氮化硅和单晶硅针尖加工材料范围有限的问题
提升了AFM的加工能力
并加工出较为复杂的微结构及微传感器。实验表明这是一种可行的微加工方法。
It is proposed to establish a micro-machining system with a three-dimension micro-displacement stage
an AFM system working in Contact and Height mode and a sharp diamond tip. A closed loop system is composed of the tip
the PSD
the feedback circuit
the scanning PZT
and the controller computer to keep the load force at the tip constant. A RS-232 serial port is used to perform the communication between a computer and the stage with programs provided to get the geometric locus of the microstructure
and then control the movement of the stage. Experimental results indicate that this system proposed is able to fabricate microstructures and parts
for example
micro sensors. The precision of their shape and dimension is mainly determined by the high precision stage. The depth can be changed by the load force of the tip or the feed of the stage. The working range of the AFM is therefore extended and almost any of the materials can be machined with this system. High precision and complex microstructures can be fabricated by optimizing the parameters.
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孙立宁,陈立国,刘品宽,等.微操作机器人显微视觉系统若干问题[J].光学精密工程,2002,10(2):171-175.SUN L N, CHEN L G, LIU P K,et al. Some issues on the micro-vision system for a micromanipulation robot[J].Optics and Precision Engineering,2002,10(2):171-175.(in Chinese)
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