王富生,谭久彬.表面微观轮廓的高分辨率光学测量方法[J].光学精密工程,2000,8(4):309-310.WANG F SH, TAN J B. Methods of high resolution optical measurement for surface profile [J]. Optics and Precision Engineering, 2000,8(4) :309-310. (in Chinese)

李文杰,张涛,黄伟.表面粗糙度、表面微观轮廓及微位移激光测量集成化方法的研究[J].四川大学学报,2000,32(6) :79-81.LI W J, ZHANG T, HUANG W. Research on elector optical integration of measuring surface roughness, surface micro-profile and micro-displacement by laser[J]. Journal of Sichuan University, 2000,32(6) :79-81. (in Chinese)

陈津平,张宝峰,胡小东,等.微型激光干涉仪应用于纳米测量机[J].测量与设备,2002,4:6-8.CHEN J P, ZHANG B F, HU X D, et al. Micro-Optical interferometry instrument in nanometer measurement device [J]. Measurement and Equipment, 2002,4:6-8. (in Chinese)

刘志俭,张志勇.MATLAB应用程序接口用户指南[M].北京:科学出版社.2001:335.LIU ZH J, ZHANG ZH Y. User guide of MATLAB application program interface [M]. BeiJing: Science Press.2001:335. (in Chinese)

周肇飞,张涛,周卫东,等.在线检测精细表面微观形貌的激光轮廓仪[J].光电工程,2001,28(2):7-10.ZHOU ZH F, ZHANG T, ZHOU W D, et al. A laser profilometer for on-line measuring microprofile of super-Fine surface [J]. Opto-Electron Engineering, 2001,28(2):7-10. (in Chines)

杨甬英,卓永模,杨明建.用于超光滑表面无损检测的光学轮廓仪[J].光电工程,1999,26(6):12-16.YANG Y Y, ZHUO Y M, YANG M J. An optical profiler used for nondestructive testing of ultra-smooth surface[J]. Opto-Electron Engineering, 2001,26(6): 12-16. (in Chinese)