Precision nanometrology of a large area microstructured metrology surface

TAKESHI Araki; SATOSHI Kiyono

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Precision nanometrology of a large area microstructured metrology surface

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- Precision nanometrology of a large area microstructured metrology surface
- Precision nanometrology of a large area microstructured metrology surface
- 光学精密工程 2003年11卷第3期页码：223-226
- 作者机构：
  
  Department of Mechatronics and Precision Engineering, Tohoku University Aramaki Aza Aoba 01, Sendai,Japan,98-8579
- 作者简介：
- 基金信息：
- DOI：
  中图分类号：
- 收稿日期：2003-01-17，
  
  修回日期：2003-03-12，
  
  网络出版日期：2003-06-15，
  
  纸质出版日期：2003-06-15
- 稿件说明：
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TAKESHI Araki, SATOSHI Kiyono. Precision nanometrology of a large area microstructured metrology surface[J]. 光学精密工程, 2003,(3): 223-226

WEI Gao, TAKESHI Araki, SATOSHI Kiyono . Precision nanometrology of a large area microstructured metrology surface[J]. Editorial Office of Optics and Precision Engineering, 2003,(3): 223-226
TAKESHI Araki, SATOSHI Kiyono. Precision nanometrology of a large area microstructured metrology surface[J]. 光学精密工程, 2003,(3): 223-226 DOI：

WEI Gao, TAKESHI Araki, SATOSHI Kiyono . Precision nanometrology of a large area microstructured metrology surface[J]. Editorial Office of Optics and Precision Engineering, 2003,(3): 223-226 DOI：

摘要

The authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages

[1]

. The surface encoder con-sists of two fundamental elements: a sinusoidalmicrostructured metrology surface

which is re-ferred to as the angle grid

and a two-dimension-al (2D) slope sensor

[2-3]

Abstract

The authors have been working on a newsurface encoder for detecting multi-degree-of-freedom(MDOF) translational and tilt motionsof precision stages

[1]

. The surface encoder con-sists of two fundamental elements: a sinusoidalmicrostructured metrology surface

which is re-ferred to as the angle grid

and a two-dimension-al (2D) slope sensor

[2-3]

关键词

Keywords

references

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GAO W, KIYONO S, SATOH E. Precision measurement of multi-degree-of-freedom spindle errors using two-dimensional slope sensors[J]. Annals of the CIRP, 2002,51-1 :447-450.

GAO W, HUANG P S. YAMADA T, et al. A compact and sensitive two-dimensioanl angle probe for flatness measurement of large silicon wafers[J]. Precision Engineering, 2002,26(4): 396-404.

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DOW T A, MILLER M H, FALTER P J. Application of a fast tool servo for diamond turning of nonrotationally symmetric surfaces[J]. Precision Engineering, 1991,13 (4): 233-250.

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GAO W, HOCKEN R J, PATTERN J A, et al. Experiments using a nano-machining instrument for nano-cutting brittle materials[J]. Annals of the CIRP , 2000,49 (1): 439-442.

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