消像差光栅的理论及实验研究

朱向冰; 付绍军; 叶为全; 何世平; 刘颖; 徐向东; 洪义麟

doi:null

您当前的位置：

首页 >

文章列表页 >

消像差光栅的理论及实验研究

现代光学仪器 | 更新时间：2020-08-12

- 消像差光栅的理论及实验研究
- Theory, design, manufacture and measurement of aberration reducing gratings
- 光学精密工程 2003年11卷第4期页码：354-358
- 作者机构：
  
  1. 安徽师范大学, 物理系, 安徽, 芜湖, 241000
  2. 中国科学技术大学, 国家同步辐射实验室, 安徽, 合肥, 230029
  3. 中国科学技术大学, 工程科学学院, 安徽, 合肥, 230027
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.10272098)()
- DOI：
  中图分类号： O436.1
- 收稿日期：2003-01-16，
  
  修回日期：2003-04-01，
  
  网络出版日期：2003-08-15，
  
  纸质出版日期：2003-08-15
- 稿件说明：
移动端阅览
朱向冰, 付绍军, 叶为全, 何世平, 刘颖, 徐向东, 洪义麟. 消像差光栅的理论及实验研究[J]. 光学精密工程, 2003,(4): 354-358

ZHU Xiang-bing, FU Shao-jun, YE Wei-quan, HE Shi-ping, LIU Ying, XU Xiang-dong, HONG Yi-lin . Theory, design, manufacture and measurement of aberration reducing gratings[J]. Editorial Office of Optics and Precision Engineering, 2003,(4): 354-358
朱向冰, 付绍军, 叶为全, 何世平, 刘颖, 徐向东, 洪义麟. 消像差光栅的理论及实验研究[J]. 光学精密工程, 2003,(4): 354-358 DOI：

ZHU Xiang-bing, FU Shao-jun, YE Wei-quan, HE Shi-ping, LIU Ying, XU Xiang-dong, HONG Yi-lin . Theory, design, manufacture and measurement of aberration reducing gratings[J]. Editorial Office of Optics and Precision Engineering, 2003,(4): 354-358 DOI：

摘要

对消像差光栅进行了理论和实验研究。用光程函数和费马原理研究光栅的成像

用刻槽分布函数表示光栅的刻槽曲率及间距变化。对成像的理论分析表明光栅刻槽分布函数比刻槽间距更容易表达像差

给出了消像差光栅的表达形式。比较了SD、WFA、LPF等光栅的参数优化方法。探讨了消像差光栅密度的干涉测量法

设计了光路

对光栅密度进行了测量。

Abstract

Fermat's principle and light path functions were used to analyze the aberration of gratings. The groove pattern function was employed to express the curvature and groove space of aberration reducing gratings

and the dispersive system containing a single grating was discussed. The groove pattern function contains more information about the imaging properties of the grating than groove space

and there is no need to project the grooves. Several expressions of aberration reducing gratings are given. The design manufacture and measurement of aberration reduced gratings are discussed. And the gratings measured by interference.

关键词

Keywords

references

HETTRICK M C, BOWYER S. Varied line-space gratings: new designs for use in grazing incidence spectrometers[J]. Appl Opt, 1983,22:3921-3924.

PALMER C, MCKINNEY W R. Imaging theory of plane-symmetric varied line-space grating systems[J]. Opt Eng, 1994,33(3): 820-829.

时轮,郝德阜.变栅距衍射光栅的原理及应用[J].光学精密工程,2001,9(3):284-288.SHI L, HAO D F. Theory and applications of varied line-space gratings[J]. Optics and Precision Engineering, 2001,9(3):284-288.(in Chinese)

KITA T, HARADA T. Use of aberration-corrected concave gratings in optical demultiplexers[J]. Appl Opt, 1983,22: 819-825.

AMIOKA T, KOIKE M, CONTENT D. Geometric theory of the ellipsoidal grating[J]. Appl Opt, 1994,33:7261-7274.

NODA H, NAMIOKA T, SEYA M. Geometric theory of grating[J]. J Opt Soc Am, 1974,64:1031-1036.

ABRAMSON N. Principle of least wave change[J]. J Opt Soc Am,1989,A6: 627-629.

DEVILLE B, BONNEMASON F. Holographically recorded, ion etched variable line space gratings[A]. Part of the SPIE Conference on Theory and Practice of Surface-Relief Diffraction: Synchrotron and Other Applications, San Diego; CA. 1998 Proc SPIE[C]. Sam Diego,1998,3450:24-35.

NAMIOKA T, KOIKE M. Aspheric wave-front recording optics for holographic gratings[J]. Appl Opt, 1995,34:2180-2186.

MCKINNEY W R, PLAMER C. Numerical design method for aberration-reduced concave grating spectrometers[J]. Appl Opt, 1987,26:3108-3118.

KOIKE M, NAMIOKA T. Merit function for the design of grating instruments[J]. Appl Opt, 1994, 33(10):2048-2056.

SHENG W F, ZHENG H W. The design of the beamline for magnetic circular dichroism study at HNSRL[J]. Nuc Instrum Meth, 2000,A440:232-240.

NAMIOKA T, KOIKE M. Analytical representation of spot diagrams and its application to the design of monochromators[J]. Nucl Instrum Methodes, 1992, A319:219-217.

HARADA T, TAKAHASHI K, SAKUMA H, et al. Optimum design of a grazing-incidence flat-field spectrograph with a spherical varied-line-space grating[J]. Appl Opt, 1999,38:2743-2748.

COCCO D, SERGO R, SOSTERO G, et al. High precision measurements of the groove density of diffraction gratings[A]. Conference on Soft X-Ray and EUV Imaging Systems, San Diego, CA, USA, Aug 03-04, Proc SPIE[C].San Diego,2000,4146:143-150.

AMEMIYA K, KOTAJIMA. Fabrication of a varied-line-spacing plane grating with aspheric wavefront holographic recording for a new grazing incidence monochromator at the Photon Factory[A]. Gratings and Grating Monochromators for Synchrotron Radiation. San Diego, CA, USA. 31 1997. Proc SPIE[C].San Diego CA, USA,1997,3150:171-182.

陈锵,王秋平,余小江,等. 变间距光栅刻线密度的测试精度分析[J].核技术,2001, 24(7):557-563.CHEN Q, WANG Q P, YU X J, et al. The groove density measurement of VLS plane grating by diffraction method[J].Nuclear Techniques, 2001,24(7):557-563.(in Chinese)

朱向冰,何世平,付绍军,等. 云纹法检测变线距光栅的线密度[J].光学精密工程,2002,10(3):285-289.ZHU X B, HE S P, FU SH J, et al. Measurement of the line-density of varied-line-space grating by Moiré fringe[J]. Optics and Precision Engineering.2002,10(3):285-289.(in Chinese)

朱向冰,付绍军,叶为全,等. 对变线距光栅干涉测量中的环形条纹的分析[J]. 光学精密工程,2002,10(6):634-637.ZHU X B, FU SH J, YE W Q,et al.Explanation of the round interference fringes in the measurement of varied-line-space gratings[J]. Optics and Precision Engineering, 2002,10(6):634-637.(in Chinese)

浏览量

370

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

利用相位差异法检测镜面面形

大型光学设备检测中大口径平行光管波像差的消除

像差在临界角方法探焦技术中的影响