微机械惯性传感器的技术现状及展望

刘危; 解旭辉; 李圣怡

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微机械惯性传感器的技术现状及展望

论文 | 更新时间：2020-08-12

- 微机械惯性传感器的技术现状及展望
- Present state and perspectives of micromachined inertial sensors
- 光学精密工程 2003年11卷第5期页码：425-431
- 作者机构：
  
  长沙国防科技大学, 湖南, 长沙, 410073
- 作者简介：
- 基金信息：
  
  国防预研项目(No.18YXGFKD118)()
- DOI：
  中图分类号： TP212
- 收稿日期：2003-05-28，
  
  修回日期：2003-07-10，
  
  网络出版日期：2003-10-15，
  
  纸质出版日期：2003-10-15
- 稿件说明：
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刘危, 解旭辉, 李圣怡. 微机械惯性传感器的技术现状及展望[J]. 光学精密工程, 2003,(5): 425-431

LIU Wei, XIE Xu-hui, LI Sheng-yi. Present state and perspectives of micromachined inertial sensors[J]. Editorial Office of Optics and Precision Engineering, 2003,(5): 425-431
刘危, 解旭辉, 李圣怡. 微机械惯性传感器的技术现状及展望[J]. 光学精密工程, 2003,(5): 425-431 DOI：

LIU Wei, XIE Xu-hui, LI Sheng-yi. Present state and perspectives of micromachined inertial sensors[J]. Editorial Office of Optics and Precision Engineering, 2003,(5): 425-431 DOI：

摘要

对微机械惯性传感器—微加速度计和微陀螺的技术现状进行了评述。根据其不同的技术实现

诸如制造过程、工作原理、控制系统、接口技术等对其进行了分类描述。这些微传感器的用途很广

而且相对于其传统器件来说有低成本、小尺寸、低功耗等特点

正在全世界范围内被广泛研究。最后

对微机械传感器领域的一些新的进展进行了讨论

并提出了展望。

Abstract

A review is given to the present state of micromachined inertial sensor-micro-accelerometers and micro-gyro. These sensors have a number of significant advantages

such as lower cost

smaller form factor and lower power consumption. Their manufacturing process

transfer mechanism

control system and interface technique are described in detail.

关键词

Keywords

references

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