基于腔结构的射频微机械谐振元件的设计

李应良; 潘武

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基于腔结构的射频微机械谐振元件的设计

微纳科学与技术 | 更新时间：2020-08-12

- 基于腔结构的射频微机械谐振元件的设计
- Design of RF MEMS resonator components based on cavity structure
- 光学精密工程 2004年12卷第3期页码：298-304
- 作者机构：
  
  重庆邮电学院, 微光机电研究所重庆,400065
- 作者简介：
- 基金信息：
  
  重庆市教委科学技术研究项目(D2002-26)();重庆邮电学院博士科研基金项目(A2002-36)()
- DOI：
  中图分类号： TH703
- 收稿日期：2003-11-29，
  
  修回日期：2004-02-07，
  
  网络出版日期：2004-06-15，
  
  纸质出版日期：2004-06-15
- 稿件说明：
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李应良, 潘武. 基于腔结构的射频微机械谐振元件的设计[J]. 光学精密工程, 2004,(3): 298-304

LI Ying-liang, PAN Wu. Design of RF MEMS resonator components based on cavity structure[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 298-304
李应良, 潘武. 基于腔结构的射频微机械谐振元件的设计[J]. 光学精密工程, 2004,(3): 298-304 DOI：

LI Ying-liang, PAN Wu. Design of RF MEMS resonator components based on cavity structure[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 298-304 DOI：

摘要

对圆柱形复合腔结构微机械谐振元件进行了设计研究

提出了一种基于柱形腔结构的微机械复合谐振元件的设计方法

并对其结构及特性进行了研究.建立了复合腔结构的电磁场数学方程

腔体基于体微机械微细加工技术实现工艺设计

最后对该元件进行了仿真分析.TM010模式下

谐振腔谐振频率为24.313299GHz

Q值为3529.707890

考虑微带耦合时仿真出复合谐振元件的最佳谐振频率为24.75GHz.仿真实验结果和理论值的平均误差不到1%

两者吻合得很好

说明了该设计的可行性.进一步改变结构参数

可获取不同谐振频率的器件

且可在腔体中填充高介电常数介质来减小器件的谐振频率

克服了以往使用腔体结构在低频段时体积过大等问题.

Abstract

The structure and performance of a complex cavity Micro-Electro-Mechanical-System resonator are analyzed with its electromagnetism equations established. Its fabrication was realized by built micromachining

and the structure is simulated on computer at the end. A micro machined-cavity resonator was designed with a TM

010

resonance quality factor of 3 529.707890 at 24.313299 GHz. When the micro-strip coupling conditions are considered

the best guess for the highest eigen frequency would be 24.75 GHz

and the average error of theoretical results and simulated results is less than 1%. The simulation results are in very good agreement with the theoretical value and this testifies the feasibility of the design. The structure parameters of the component are further varied

to obtain multivarious frequency components. The resonance frequency of a component is reduced by filling high permittivity medium

and this makes it possible to keep the design of a component compact at low frequency even.

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references

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