纳米精度压电马达的动力学模拟及试验

段智勇; 王庆康; 曾令刚; 费继承

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纳米精度压电马达的动力学模拟及试验

微纳科学与技术 | 更新时间：2020-08-12

- 纳米精度压电马达的动力学模拟及试验
- Dynamic simulation and testing of a novel piezoelectric nanomotor
- 光学精密工程 2004年12卷第3期页码：287-291
- 作者机构：
  
  上海交通大学, 微米/纳米科学技术研究院上海,200030
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TM38
- 收稿日期：2003-11-12，
  
  修回日期：2004-02-24，
  
  网络出版日期：2004-06-15，
  
  纸质出版日期：2004-06-15
- 稿件说明：
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段智勇, 王庆康, 曾令刚, 费继承. 纳米精度压电马达的动力学模拟及试验[J]. 光学精密工程, 2004,(3): 287-291

DUAN Zhi-yong, WANG Qing-kang, ZENG Ling-gang, FEI Ji-cheng. Dynamic simulation and testing of a novel piezoelectric nanomotor[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 287-291
段智勇, 王庆康, 曾令刚, 费继承. 纳米精度压电马达的动力学模拟及试验[J]. 光学精密工程, 2004,(3): 287-291 DOI：

DUAN Zhi-yong, WANG Qing-kang, ZENG Ling-gang, FEI Ji-cheng. Dynamic simulation and testing of a novel piezoelectric nanomotor[J]. Editorial Office of Optics and Precision Engineering, 2004,(3): 287-291 DOI：

摘要

设计并制作完成了一种基于压电陶瓷逆压电效应的纳米精度压电步进马达.根据其结构简化模型

推导出该压电纳米马达在脉冲电源作用下的运动特性表达式.编写软件

设定参数对压电马达的运动性能进行模拟

结果表明了马达的线性步进运动特点.设计光栅测试系统

对压电马达样机进行运动测试

试验结果证实了模拟结构的正确性.该类压电纳米马达具有可以实现连续步进位移

步进速度快

单步分辨率小

行程长和便于利用微机实现智能控制等特点.纳米马达的位移分辨率可以达到10nm

最快速度为0.6mm/s

最长行程为5cm.

Abstract

A nanometer precision stepper piezoelectric motor has been designed and fabricated based on converse piezoelectric effect. From the simple model established from the motor's configuration

dynamic characteristic equations are deduced with pulses applied on the piezoelectric stack. The movement of the motor was simulated with some coefficients applied. The results of the simulation show that the motor is a linear stepper motor. A grating testing system was designed to test the piezoelectric motor. The experimental results prove that the simulations are true. This piezoelectric nanomotor can achieve serial step movement at higher speed with higher resolution in longer range

and it is easy to control by computer. The displacement resolution of the motor could be 10 nm at 0.6 mm/s in the range is 5 cm.

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references

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