应力变化对多层薄膜窄带滤光片透射光谱的影响

王成; 张贵彦; 肖孟超; 马莹; 钱龙生

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应力变化对多层薄膜窄带滤光片透射光谱的影响

材料科学与技术 | 更新时间：2020-08-12

- 应力变化对多层薄膜窄带滤光片透射光谱的影响
- Influences of stress changes on transmission characteristics of multilayer thin-film narrow bandpass filters
- 光学精密工程 2004年12卷第4期页码：393-397
- 作者机构：
  
  中国科学院, 长春光学精密机械与物理研究所,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家863计划资助项目(2001AA312100)();中国科学院光电科技集团项目(KGCX2-405)()
- DOI：
  中图分类号： O484.4
- 收稿日期：2004-02-23，
  
  修回日期：2004-05-16，
  
  网络出版日期：2004-08-15，
  
  纸质出版日期：2004-08-15
- 稿件说明：
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王成, 张贵彦, 肖孟超, 马莹, 钱龙生. 应力变化对多层薄膜窄带滤光片透射光谱的影响[J]. 光学精密工程, 2004,(4): 393-397

WANG Cheng, ZHAN Gui-yan, XIAO Meng-chao, MA Ying, QIANG Long-sheng. Influences of stress changes on transmission characteristics of multilayer thin-film narrow bandpass filters[J]. Editorial Office of Optics and Precision Engineering, 2004,(4): 393-397
王成, 张贵彦, 肖孟超, 马莹, 钱龙生. 应力变化对多层薄膜窄带滤光片透射光谱的影响[J]. 光学精密工程, 2004,(4): 393-397 DOI：

WANG Cheng, ZHAN Gui-yan, XIAO Meng-chao, MA Ying, QIANG Long-sheng. Influences of stress changes on transmission characteristics of multilayer thin-film narrow bandpass filters[J]. Editorial Office of Optics and Precision Engineering, 2004,(4): 393-397 DOI：

摘要

利用薄膜应力公式和弹性力学的小挠度弯曲理论分析了在应力变化情况下

多层薄膜应变与膜厚变化的关系

并建立其数学模型

提出多层薄膜各层厚度变化的不均匀性理论.利用这个模型在应力减小200MPa条件下对138层4腔的100GHz滤光片光谱进行了模拟

与设计值比较发现中心波长增加了0.562nm;0.5dB处的带宽比设计值减小0.124nm;25dB处的带宽比设计值减小0.01nm;谱线矩形化变差;插损也有明显的增加.说明了应力变化引起的光学薄膜厚度变化的不均匀性是引起这种窄带干涉滤光片光谱退化的主要原因之一.实验结果为100GHz的窄带滤光片热处理后中心波长增加0.325nm;0.5dB处带宽减少0.01nm;20dB处带宽增加0.014nm;插损增加

谱线通带变形严重

纹波增大

光谱退化了.实验结果与理论分析一致.

Abstract

On the base of film stress formula and micro-bending principle of elasticity

the relation between multilayer film strain and film thickness was analyzed. A mathematic model was established

and a new theory that thickness of multilayer film changes disuniform was brought forward. By using this model

the spectrum of 100 GHz filter with 138 layers and 4 cavities was simulated when the stress decreased by 200 MPa. Compared with the designed value

it was found that central wavelength increased by 0.562 nm

bandwidth decreased by 0.124 nm at 0.5 dB and 0.01 nm at 25 dB

rectangular spectrum deformed

and insert loss increased apparently. These demonstrated that uneven film thickness caused by stress change was the main reason that caused spectrum of narrow-band interference filter to degrade. Experimental results were that central wavelength of 100 GHz narrow-band filter increased by 0.325 nm after heat treatment

bandwidth decreased by 0.01 nm at 0.5 dB and 0.014 nm at 20 dB

insert loss increased

spectrum of pass band deformed badly

and ripple enlarged. The experimental result conforms to the theory analysis.

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