磁悬浮进给机构的磁力耦合

宋文荣; 陈阳; 宋晓东; 何惠阳; 郭凡林

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磁悬浮进给机构的磁力耦合

现代光学仪器与精密机械 | 更新时间：2020-08-12

- 磁悬浮进给机构的磁力耦合
- Magnetic force coupling in maglev feeding mechanism
- 光学精密工程 2004年12卷第4期页码：411-414
- 作者机构：
  
  1. 中国科学院, 长春光学精密机械与物理研究所,吉林长春,130033
  2. 厦门宏发电声有限公司,福建厦门,361021
  3. 中国电子科技集团公司, 第48研究所,湖南长沙,410111
  4. 吉林建筑工程学院, 基础科学系,吉林长春,120021
- 作者简介：
- 基金信息：
  
  吉林省自然科学基金项目(20020621)();中国科学院研究生科学与社会实践创新研究专项资助项目(科发人教字[2002] 118号)()
- DOI：
  中图分类号： TH133.3
- 收稿日期：2004-02-18，
  
  修回日期：2004-06-08，
  
  网络出版日期：2004-08-15，
  
  纸质出版日期：2004-08-15
- 稿件说明：
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宋文荣, 陈阳, 宋晓东, 何惠阳, 郭凡林. 磁悬浮进给机构的磁力耦合[J]. 光学精密工程, 2004,(4): 411-414

SONG Wen-rong, CHEN Yang, SONG Xiao-dong, HE Hui-yang, GUO Fan-lin. Magnetic force coupling in maglev feeding mechanism[J]. Editorial Office of Optics and Precision Engineering, 2004,(4): 411-414
宋文荣, 陈阳, 宋晓东, 何惠阳, 郭凡林. 磁悬浮进给机构的磁力耦合[J]. 光学精密工程, 2004,(4): 411-414 DOI：

SONG Wen-rong, CHEN Yang, SONG Xiao-dong, HE Hui-yang, GUO Fan-lin. Magnetic force coupling in maglev feeding mechanism[J]. Editorial Office of Optics and Precision Engineering, 2004,(4): 411-414 DOI：

摘要

研究了磁悬浮进给机构在进给运动时的磁力耦合现象.进给机构的磁悬浮系统采用了具有自动归中作用的V型导轨结构

保证了机构进给运动的导向精度

可应用于光刻机等精密光机系统

且满足超净无尘及精密定位要求.通过分析机构磁悬浮系统中电磁铁的磁力分布

给出了耦合磁力的计算公式.分析结果表明:磁悬浮系统在其控制过程中存在着磁力耦合

具体表现为:如果进给运动时平台在水平方向发生偏移

那么左右两侧电磁铁的磁力在水平及水平垂直方向将产生相互耦合作用;而垂直方向的偏移不会引起磁力的耦合.在控制系统中引入补偿器后

可使系统解耦

因产生的耦合磁力很微小

可以忽略不记.

Abstract

The magnetic coupling force existing when a magnetic levitation(maglev)feeding mechanism moves was analyzed. With a V-shaped guide rail in its maglev system and a balance point automatically regressed

the maglev feeding mechanism has a high guiding accuracy

and can be applied to IT manufacturing devices such as laser lithography tools to meet the needs of the super-clean condition and the precision positioning. Then the distribution of the magnetic forces in the maglev system was analyzed

and a set of formulas of the coupling was derived. The results show that the magnetic force coupling exists in the maglev system's controlling process. When the feeding mechanism moves its offset along the y-axis

the magnetic forces of the two magnets along the y-axis and the z-axis must couple each other; but when the feeding mechanism moves its offset along the z-axis

there will be no magnetic force coupling between the two magnets along the y-axis and the z-axis. The magnetic force coupling can be reduced or even be eliminated after a decoupling control with compensation added into the maglev controlling system.

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Keywords

references

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