自聚焦超晶格波导电光调制器

孙德贵; 刘志福; HO Seng-Tiong; 康虎; 朱培旺; MARKS Tobin

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自聚焦超晶格波导电光调制器

材料科学与技术 | 更新时间：2020-08-12

- 自聚焦超晶格波导电光调制器
- Electro-optic modulators with self-assembled superlattice waveguides
- 光学精密工程 2004年12卷第4期页码：386-392
- 作者机构：
  
  1. 美国西北大学, 量子光学实验室, 埃维斯顿, 伊利诺斯州,60208
  2. 美国西北大学, 化学系, 埃维斯顿, 伊利诺斯州, 60208
- 作者简介：
- 基金信息：
  
  This work supported by DARPA/ARO,and the MRSEC Program of NSF at Northwestern Univer
- DOI：
  中图分类号： TN252
- 收稿日期：2004-03-24，
  
  修回日期：2004-06-05，
  
  网络出版日期：2004-08-15，
  
  纸质出版日期：2004-08-15
- 稿件说明：
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孙德贵, 刘志福, HO Seng-Tiong, 康虎, 朱培旺, MARKS Tobin. 自聚焦超晶格波导电光调制器[J]. 光学精密工程, 2004,(4): 386-392

SUN De-gui, LIU Zhi-fu, HO Seng-tiong, KANG Hu, ZHU Pei-wang, MARKS Tobin. Electro-optic modulators with self-assembled superlattice waveguides[J]. Editorial Office of Optics and Precision Engineering, 2004,(4): 386-392
孙德贵, 刘志福, HO Seng-Tiong, 康虎, 朱培旺, MARKS Tobin. 自聚焦超晶格波导电光调制器[J]. 光学精密工程, 2004,(4): 386-392 DOI：

SUN De-gui, LIU Zhi-fu, HO Seng-tiong, KANG Hu, ZHU Pei-wang, MARKS Tobin. Electro-optic modulators with self-assembled superlattice waveguides[J]. Editorial Office of Optics and Precision Engineering, 2004,(4): 386-392 DOI：

摘要

研制了一种基于自聚焦超晶格薄膜电光波导调制器.首先给出了自聚焦超晶格薄膜电光特性的测量和器件结构的优化设计

采用测量二次谐波生成值对入射角的依赖关系测定了薄膜的有效电光系数

保证了器件的设计精确有效.利用多层膜传输理论研究了器件电极对光波的最大吸收

并对器件结构进行了优化

获得了最小调制电压.其次给出了所加工的实验模型结构和扫描电子显微镜(SEM)图片

确保了加工质量和设计结果的一致.研究结果表明:这种无需外电场极化处理的新型聚合物薄膜电光调制器加工难度小

并且光学损耗优化到了1.0dB/cm.

Abstract

This paper reports a new waveguide electro-optic(EO)modulator with self-assembled superlattice(SAS)electro-optic films. This work focuses on the measurement for the EO coefficient of SAS films and the optimization for the devices structure. In order to have a precise and effective design

we test the angle-dependence of the second harmonic generation of incident laser beam to determine the effective EO coefficient. We study he absorptive loss of electrodes of devices with the optical propagation theory of multi-layered films and optimize the devices structure to obtain the lowest drive voltage. The paper gives the structure of experimental samples and the scanned electronic microscopy(SEM)pictures of our fabricated devices. Finally

1.0 dB/cm optical propagation loss of the EO modulators is achieved

which agrees with the experimental results.

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Keywords

references

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