基于MEMS微加工技术的高灵敏度隧道传感器的研究

薛伟; 王晶; 崔天宏

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基于MEMS微加工技术的高灵敏度隧道传感器的研究

微纳科学与技术 | 更新时间：2020-08-12

- 基于MEMS微加工技术的高灵敏度隧道传感器的研究
- Highly sensitive micromachined tunneling sensors
- 光学精密工程 2004年12卷第5期页码：491-503
- 作者机构：
  
  美国明尼苏达大学, 机械工程系和纳米加工研究中心
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TP212.1
- 收稿日期：2004-03-16，
  
  修回日期：2004-06-27，
  
  网络出版日期：2004-10-15，
  
  纸质出版日期：2004-10-15
- 稿件说明：
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薛伟, 王晶, 崔天宏. 基于MEMS微加工技术的高灵敏度隧道传感器的研究[J]. 光学精密工程, 2004,(5): 491-503

XUE Wei, WANG Jing, CUI Tian-hong . Highly sensitive micromachined tunneling sensors[J]. Editorial Office of Optics and Precision Engineering, 2004,(5): 491-503
薛伟, 王晶, 崔天宏. 基于MEMS微加工技术的高灵敏度隧道传感器的研究[J]. 光学精密工程, 2004,(5): 491-503 DOI：

XUE Wei, WANG Jing, CUI Tian-hong . Highly sensitive micromachined tunneling sensors[J]. Editorial Office of Optics and Precision Engineering, 2004,(5): 491-503 DOI：

摘要

基于硅加工的高灵敏微型隧道传感器在过去15年里得到了充分的发展.多种隧道传感器被开始出来

例如加速度计

角速度计

红外传感器

磁性传感器等.首先对基于硅加工的隧道传感进行了简单的总结.对四种传感器进行了总结和讨论

包括几种器件的结构设计

加工过程

器件性能

控制电路和系统噪音.特别介绍了一种新型的基于高分子聚合物的隧道加速度计

并讨论了其结构

加工与测试

隧道效应得到了进一步验证.同时给出了这种新型高灵敏传感器在很多领域的应用展望.

Abstract

Highly sensitive silicon micromachined tunneling sensors with small size and light mass have been widely explored in the last 15 years. Many types of tunneling sensors have been developed. This paper presents a review of silicon micromachined tunneling sensors. Four types of tunneling sensors including accelerometers

gyroscopes

infrared sensors

and magnetic sensors are reviewed. Various designs

fabrication procedures

performance

control systems

and noise constraints of silicon tunneling sensors are described and discussed. Novel polymer-based tunneling accelerometers fabricated by PMMA and hot embossing technique are introduced. The structure

fabrication process and characterization of the polymer-based sensor are presented. We can expect that the polymer tunneling sensor has the potential to become the basis for the next generation of highly sensitive MEMS-based sensors in many areas.

关键词

Keywords

references

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