合肥同步辐射反射率测量装置

薛松; 邵景鸿; 卢启鹏; 王兆岚; 徐仲

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合肥同步辐射反射率测量装置

现代光学仪器与精密机械 | 更新时间：2020-08-12

- 合肥同步辐射反射率测量装置
- Reflectivity measuring device the in national synchrotron radiation laborator
- 光学精密工程 2004年12卷第5期页码：480-484
- 作者机构：
  
  中国科学院, 长春光学精密机械与物理研究所,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家重大科学工程项目()
- DOI：
  中图分类号： TH741
- 收稿日期：2004-07-22，
  
  修回日期：2004-08-26，
  
  网络出版日期：2004-10-15，
  
  纸质出版日期：2004-10-15
- 稿件说明：
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薛松, 邵景鸿, 卢启鹏, 王兆岚, 徐仲. 合肥同步辐射反射率测量装置[J]. 光学精密工程, 2004,(5): 480-484

XUE Song, SHAO Jing-hong, LU Qi-peng, WANG Zhao-lan, XU Zhong. Reflectivity measuring device the in national synchrotron radiation laborator[J]. Editorial Office of Optics and Precision Engineering, 2004,(5): 480-484
薛松, 邵景鸿, 卢启鹏, 王兆岚, 徐仲. 合肥同步辐射反射率测量装置[J]. 光学精密工程, 2004,(5): 480-484 DOI：

XUE Song, SHAO Jing-hong, LU Qi-peng, WANG Zhao-lan, XU Zhong. Reflectivity measuring device the in national synchrotron radiation laborator[J]. Editorial Office of Optics and Precision Engineering, 2004,(5): 480-484 DOI：

摘要

分析设计并研制了同步辐射计量光束线的反射率计系统.该反射率计工作波长5～100nm

角分辨率0.005°

样品台可做六维调整

样品与探测器采用同轴扫描馈入机构

大大提高了扫描运动及测量精度.样品和探测器均具有平移和旋转两种功能

并且既可独立运动

又可θ-2θ同步联动

样品和探测器均可退出光路

通过束线差分系统和反射率计差分馈入系统可充分保证10

-6

～10

-8

Torr的真空度.对样品的反射率测试可分波长扫描和角度扫描两种方式.

Abstract

The reflectometer in the National Synchrotron Radiation Laboator(NSRL)radiometry metrology experimental station was designed and developed. The wavelengh range is 500～100 nm

and the angle differentiate is 0.005°. Sample table can be adjusted six dimensions. The together-axis feed-through is employed by sample scanner and detector scanner

so that the scan precision of movement and measurement are improved greatly. The sample and detector can both move and rotate

not only rotating singly but also together at θ-2θ angle

and they can exit from light path. By using beamline difference system and reflectometer difference feed-through system

-6

～10

-8

Torr vacuum is obtainable. The sample reflectivity can be measured by wavelengh scan and angle scan.

关键词

Keywords

references

薛松,邵景鸿,除正良,等.同步辐射软X射线多层膜分光反射率测试装置[J] .光学精密工程,1993,1(3):24-28.XUE S, SHAO J H, XU ZH L, et al. Reflectivity-measuring equipment for soft X-ray synchrotron radiation using a multilayer dispersing[J] . Optics and Precision Engineering.1993,1(3):24-28.(in Chinese)

薛松,邵景鸿.同步辐射软X射线多层膜反射率计的设计[J] . 光学精密工程,1994,2(3):85-88.XUE S, SHAO J H. Design of soft X-ray synchrotron radiation multilayer reflectometer[J] .Optics and Precision Engineering, 1994,2(3):85-88.(in Chinese)

崔明启. 北京同步辐射软X光反射率计装置及其物理工作[J] . 高能物理与核物理,1995,19(1):82-86.CUI M Q. New soft X-Ray reflectomoter on beijing synchrotron radiation facility and some basic results of physics work[J] .High Energy Physic and Nuclear Physic,1995,19(1):82-86.(in Chinese)

孙可煦.软X光平面镜反射率标定实验[J] .光学学报,2002,22(3):379-382.SUN K K.Reflectivity calibration of soft X-Ray planar mirror in the BSRF[J] . Acta Optica Sinica, 2002,22(3):379-382.(in Chinese)

HOGREFE H, GIESENBERG D, HAELBICH R P. A New VUV-reflectometer for UHV-applications[J] .Nuclear Instruments and Methods, 1983,208:415-418.

MIHIRO Y. Soft x-ray reflection from SiC, TiC, and WC mirrors[J] .Appl. Opt.,1986,25(24):4586-4590.

FUCHSchs D. HIGH precision soft x-ray reklectmeter[J] .Rev. Sci. Instrum,1995,66(2):2248-2250.

达道安.真空设计手册[J] .北京:国防工业出版社,1991.AN D AN.Design handbook of the vacuum[J] . Beijing:National Defense Industry Press,1991.(in Chinese)

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