使用气体靶激光等离子体光源的软X射线反射率计

尼启良; 齐立红; 陈波

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使用气体靶激光等离子体光源的软X射线反射率计

论文 | 更新时间：2020-08-12

- 使用气体靶激光等离子体光源的软X射线反射率计
- Soft X-ray reflectometer based on laser-produced plasma source with a gas-jet target
- 光学精密工程 2004年12卷第6期页码：576-580
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所, 应用光学国家重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目(No.10333010)();应用光学国家重点实验室基金()
- DOI：
  中图分类号： O536
- 收稿日期：2004-04-22，
  
  修回日期：2004-11-18，
  
  网络出版日期：2004-12-15，
  
  纸质出版日期：2004-12-15
- 稿件说明：
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尼启良, 齐立红, 陈波. 使用气体靶激光等离子体光源的软X射线反射率计[J]. 光学精密工程, 2004,(6): 576-580

NI Qi-liang, QI Li-hong, CHEN Bo. Soft X-ray reflectometer based on laser-produced plasma source with a gas-jet target[J]. Editorial Office of Optics and Precision Engineering, 2004,(6): 576-580
尼启良, 齐立红, 陈波. 使用气体靶激光等离子体光源的软X射线反射率计[J]. 光学精密工程, 2004,(6): 576-580 DOI：

NI Qi-liang, QI Li-hong, CHEN Bo. Soft X-ray reflectometer based on laser-produced plasma source with a gas-jet target[J]. Editorial Office of Optics and Precision Engineering, 2004,(6): 576-580 DOI：

摘要

建立了一台使用气体靶激光等离子体光源的软X射线反射率计

并给出了使用该反射率计测量软X射线多层膜反射率的方法.与金属靶等离子体光源相比

由于使用了气体靶等离子体光源

该反射率计具有低碎屑、可长期连续运行等优点.针对单色仪的二级光谱对反射率测量结果产生的影响

提出了修正方法.并用此方法对实测的工作波长为17.1nm软X射线多层膜的反射率曲线进行了修正.

Abstract

A soft X-ray reflectometer using a laser produced-plasma(LPP)light source with gas-jet target is built

and the method to measure the reflectance of soft X-ray multilayer coatings employing the reflectometer is presented. In comparison with metal target LPP source

due to usage of gas-jet target LPP source

the reflectometer is debris-free and can continuously operate for a long time. At the same time

a new method to delete the effect of 2nd spectrum from monochromator on measurement results of soft X-ray multilayer coatings reflectance is put forward. A curve of reflectance Vs. wavelength of soft X-ray multilayer coating with center wavelength 17.1 nm is modified to utilize the method.

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references

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AKIRA MIYAKE, TAKESHI MIYACHI, MITSUAKI AMEMIYA, et al. LPP-based reflectometer for characterization of EUV lithography systems[J] .SPIE, 2003, 5037:647-655.

TRAIL J A,BYER R L. Measurement of soft X-ray multilayer mirror reflectance at normal incidence using laser-produced plasma[J] . Appl. Phys. Lett., 1988, 52(4):269-271.

JOHANSSON G A, BERGLUND M. Compact soft X-ray reflectometer based on a line-emitting laser-plasma source[J] . Review of scientific instruments, 2001, 72(1):58-62.

WINDT D L, WASKIEWICZ W K, Soft X-ray reflectometry of multilayer coatings using a laser-plasma source[J] . SPIE, 1991, 1547:144-158.

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