一种可直接脉冲调制的MEMS红外激发源

纪新明; 吴飞蝶; 王建业; 周 嘉; 谢海芬; 黄宜平

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一种可直接脉冲调制的MEMS红外激发源

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- 一种可直接脉冲调制的MEMS红外激发源
- MEMS directly modulating wideband IR thermal source
- 光学精密工程 2005年13卷第2期页码：144-150
- 作者机构：
  
  复旦大学微电子学系, 上海 200433
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TN212
- 收稿日期：2005-02-14，
  
  修回日期：2005-03-30，
  
  网络出版日期：2005-04-30，
  
  纸质出版日期：2005-04-30
- 稿件说明：
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纪新明, 吴飞蝶, 王建业, 等. 一种可直接脉冲调制的MEMS红外激发源[J]. 光学精密工程, 2005,13(2):144-150.

JI Xin-ming, WU Fei-die, WANG Jian-ye, et al. MEMS directly modulating wideband IR thermal source[J]. Optics and precision engineering, 2005, 13(2): 144-150.
纪新明, 吴飞蝶, 王建业, 等. 一种可直接脉冲调制的MEMS红外激发源[J]. 光学精密工程, 2005,13(2):144-150. DOI：

JI Xin-ming, WU Fei-die, WANG Jian-ye, et al. MEMS directly modulating wideband IR thermal source[J]. Optics and precision engineering, 2005, 13(2): 144-150. DOI：

摘要

针对红外气体探测器对光源的要求

结合现有MEMS(微机电系统)工艺及与其兼容的IC工艺

研制了一种可用于红外多气体传感器的脉冲式MEMS辐射光源。该光源主要有Si

/SiO

的复合支撑层和铂金发热电极组成

可以产生相当于黑体300~800 K的红外辐射

在温度

＝1 106 K时有

=2.62 μm峰值辐射波长;并且光源有足够强的辐射强度和2~15 μm红外辐射波段

能够满足大部分气体在2~14 μm波长范围内特征的吸收谱线的要求。经过对辐射元的动态测量可知

辐射源的动态调制频率可达到50 Hz

完全能够满足气体测量对所需红外光源调制频率的要求。

Abstract

A mid-IR thermal source based on electrical heating of platinum film is studied. The IR source with an effectively emitting area diameter of 1.6 mm is obtained from heated platinum thin film resistors that deposit on a Si

/SiO

membrane. It can emit wideband infrared light with a peak wavelength of

=2.62 μm at 1 106 K and adapt to direct modulation with variable voltage. Appropriate heat transfer makes it possible to reach a modulation frequency as high as 50 Hz. Such specifications meet the requirements of various IR gas sensors

and it can be regarded as a new thermal IR source to be used in NDIR (non-dispersive infrared) gas analyzer.

关键词

Keywords

references

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