两侧下拉电极MEMS压控电容的分析和优化

刘泽文; 韦 嘉; 王 昱; 方 杰; 刘理天; 李志坚

doi:null

您当前的位置：

首页 >

文章列表页 >

两侧下拉电极MEMS压控电容的分析和优化

更新时间：2020-08-12

- 两侧下拉电极MEMS压控电容的分析和优化
- Analysis and optimization of a side pull-down electrodes controlled MEMS varactor
- 光学精密工程 2005年13卷第2期页码：135-143
- 作者机构：
  
  清华大学微电子学研究所,北京 100084
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TM532.5
- 收稿日期：2005-02-22，
  
  修回日期：2005-03-06，
  
  网络出版日期：2005-04-30，
  
  纸质出版日期：2005-04-30
- 稿件说明：
移动端阅览
刘泽文, 韦嘉, 王昱, 等. 两侧下拉电极MEMS压控电容的分析和优化[J]. 光学精密工程, 2005,13(2):135-143.

LIU Ze-wen, WEI Jia, WANG Yu, et al. Analysis and optimization of a side pull-down electrodes controlled MEMS varactor[J]. Optics and precision engineering, 2005, 13(2): 135-143.
刘泽文, 韦嘉, 王昱, 等. 两侧下拉电极MEMS压控电容的分析和优化[J]. 光学精密工程, 2005,13(2):135-143. DOI：

LIU Ze-wen, WEI Jia, WANG Yu, et al. Analysis and optimization of a side pull-down electrodes controlled MEMS varactor[J]. Optics and precision engineering, 2005, 13(2): 135-143. DOI：

摘要

基于能量法对两侧下拉电极控制(SPEC)的MEMS(微机电系统)压控电容进行了分析和优化。使用数值迭代方法计算了压控电容可动极板的挠度试解函数

得到了试解函数形状在不同驱动电压下的曲线。计算结果与有限元仿真所得结果一致。在此基础上

给出了基于铝材料的两侧下拉电极MEMS压控电容的优化过程

得到了优化结果。对于初始应力5 MPa

杨式模量70 GPa

极板厚度1.5 μm

极板间距1 μm

总长度为600 μm的铝材料压控电容

控制电极采用70 μm的优化长度

可以实现变化比率为2∶1电容变化比率。结果表明采用(SPEC)结构的压控电容

能有效地减小或避免静电微机械结构特有的"崩塌"效应

获得较大的电容调节范围。

Abstract

The analysis and optimization of a SPEC (Side pull-down electrodes controlled) MEMS(Micro-electro-mechanical system) varactor with energy method is presented. A two-step iterative calculation is used to generate the trial displacement function under different control voltages. The calculated displacement as a function of control voltage is verified by FEA(Finite element analysis) simulation with good accuracy. Based on the established method

the geometric parameters of SPEC varactors with aluminum as structure materials are optimized. For a SPEC varactor with an initial aluminum membrane stress of 5 MPa

with young module 70 GPa

plate thickness 1.5 μm

gap 1 μm and total length of the suspended plate 600 μm

the optimized length of side controlling electrodes should be 70 μm

which can achieve a tuning rate of 2∶1. The calculation shows that SPEC MEMS varactor

compared with the conventional two-plate MEMS varactors

can greatly extend the tuning rate of MEMS varactors by reducing or avoiding the pull-in effect.

关键词

Keywords

references

. 潘武,钟先信,巫正中. 无线通信系统中的微尺度射频元件[J]. 光学精密工程,2001,9(4):304-310. PAN W, ZHONG X X, WU Z Z. Microscale RF components in wireless communication system [J]. Optics and Precision Engineering, 2001,9(4): 304-310.(in Chinese)

. DEC A,SUYAMA K. Micromachined electromechanically tunable capacitors and their applications to RF ICs [J]. IEEE Trans. Microwave Theory Tech., 1998,46: 2587-2595.

. YOUND D J,BOSER B E. A micromachined variable capacitor for monolithic low-noise VCOs .Technical Digest, IEEE Solid-State Sensor and Actuator Workshop, 1996:86-89.

. ZOU J,LIU C,SCHUTT-AINE J. Development of a wide tuning capacitor for wireless communications systems . Electron Devices Meeting, IEDM Technical Digest, 2000:403-406.

. 梁雪冬,刘泽文. 用于射频领域的高调节范围MEMS压控电容 [J]. 压电与声光,2003,25(3): 252-254. LIANG X D, LIU Z W. Design and simulation of a high-tuning-range MEMS voltage controlled capacitor for RF applications [J]. Piezoelectrics and Acoustooptics, 2003,25(3): 252-254. (in Chinese)

. DEC A,SUYAMA K. Microwave MEMS-based voltage-controlled oscillators[J]. IEEE Trans. Microwave Theory Tech., 2000, 48: 1943-1949.

. DUSSOPT L,REBEIZ G M. High-Q millimeter-wave MEMS varactor: extended tuning range and discrete-position designs . IEEE MTT-S International Microwave Symposium Digest, 2002:1205-1208.

. WEI J,LIU Z W. The study on a voltage controlled capacitor with complex membrane . 7th International conference on Solid-State and Integrated Circuits Technology Proceedings, 2004:1707-1710.

. 邹泉波,刘理天. 多晶硅梁用于为机械薄膜机械性能参数的测量[J]. 仪器仪表学报,1995,16(1): 319-323. ZOU Q B, LIU L T. Poly-Si beams for determining mechanical properties of thin film in surface micromachining[J]. Chinese Journal of Scientific Instrument,1995,16(1): 319-323. (in Chinese)

. LIU Z W,LEI X F,XUAN Y. An analytical model for high performance capacitive RF MEMS switch design[J]. International Journal of Nonlinear Sciences and Numerical Simulation,2002,3: 365-368.

. HUNG E S,SENTURIA S D. Extending the travel range of analog-tuned electrostatic actuators[J]. J. Microelectromechanical System, 1999,8(4): 497-505.

浏览量

428

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

一种可直接脉冲调制的MEMS红外激发源

MEMS固体化学推进器设计与建模研究