Fabrication and characterization of rugate structures composed of SiO2 and Nb2O5

R. Leitel; O. Stenzel; S. Wilbrandt; D. G bler; V. Janicki; N. Kaiser

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Fabrication and characterization of rugate structures composed of SiO₂ and Nb₂O₅

更新时间：2020-08-12

- Fabrication and characterization of rugate structures composed of SiO₂ and Nb₂O₅
- Fabrication and characterization of rugate structures composed of SiO₂ and Nb₂O₅
- 光学精密工程 2005年13卷第4期页码：505-511
- 作者机构：
  
  1. Institut für Angewandte Physik,Friedrich Schiller University Jena, Max-Wien-Platz 1, 07743 Jena, Germany
  2. Optical Coatings Department, Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert-Einstein-Str. 7, D-07745 Jena, Germany
  3. Institute Ruder Boskovic, Bijenicka 54, 10000 Zagreb, Croatia
- 作者简介：
- 基金信息：
- DOI：
  中图分类号：
- 收稿日期：2005-06-06，
  
  修回日期：2005-06-16，
  
  网络出版日期：2005-08-30，
  
  纸质出版日期：2005-08-30
- 稿件说明：
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R. Leitel, O. Stenzel, S. Wilbrandt, 等. Fabrication and characterization of rugate structures composed of SiO₂ and Nb₂O₅[J]. 光学精密工程, 2005,13(4):505-511.

R. Leitel, O. Stenzel, S. Wilbrandt, et al. Fabrication and characterization of rugate structures composed of SiO₂ and Nb₂O₅[J]. Optics and precision engineering, 2005, 13(4): 505-511.
R. Leitel, O. Stenzel, S. Wilbrandt, 等. Fabrication and characterization of rugate structures composed of SiO₂ and Nb₂O₅[J]. 光学精密工程, 2005,13(4):505-511. DOI：

R. Leitel, O. Stenzel, S. Wilbrandt, et al. Fabrication and characterization of rugate structures composed of SiO₂ and Nb₂O₅[J]. Optics and precision engineering, 2005, 13(4): 505-511. DOI：

摘要

Gradient index layers and rugate structures were fabricated on a

Leybold Syrus pro

deposition system by plasma-assisted coevaporation of the low index material silica and the high index material niobium pentoxide. To obtain information about the compositional profiles of the produced layers

cross sectional transmission electron microscopy was used in assistance to deposition rate data recorded by two independent crystal monitors during the film preparation. The depth dependent concentration profiles were transformed to refractive index gradients by means of effective medium approximation. Based on the refractive index gradients the corresponding samples` transmission and reflection spectra could be calculated by utilizing matrix formalism. The relevance of the established refractive index profiles could be verified by comparison of the calculated spectra with the measured ones.

Abstract

Gradient index layers and rugate structures were fabricated on a

Leybold Syrus pro

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Keywords

references

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