Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert-Einstein-Str. 7,D-07745 Jena, Germany
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收稿日期:2005-06-06,
修回日期:2005-06-16,
网络出版日期:2005-08-30,
纸质出版日期:2005-08-30
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Norbert Kaiser, Torsten Feigl, Olaf Stenzel, 等. Optical coatings:trends and challenges[J]. 光学精密工程, 2005,13(4):389-396.
Norbert Kaiser, Torsten Feigl, Olaf Stenzel, et al. Optical coatings:trends and challenges[J]. Optics and precision engineering, 2005, 13(4): 389-396.
Norbert Kaiser, Torsten Feigl, Olaf Stenzel, 等. Optical coatings:trends and challenges[J]. 光学精密工程, 2005,13(4):389-396.DOI:
Norbert Kaiser, Torsten Feigl, Olaf Stenzel, et al. Optical coatings:trends and challenges[J]. Optics and precision engineering, 2005, 13(4): 389-396.DOI:
and architecture stimulation are important developments in physics and technology of optical coatings. This paper will focus on the latest advances in the areas of new optical film systems and devices
new optical coating materials and film fabrication techniques
process control and monitoring
and different advanced applications. Particularly
focus is on optical films that combine optical design with microstructural features tailored on the nanometer and micrometer scales. Evaluation of film stability and integrity in harsh industrial environments and their compatibility with organic polymers are important as well.
Abstract
New applications in optoelectronics
photonics
telecommunication
displays
optical data processing
biomedicine
sensors
energy control
automobile
aerospace
and architecture stimulation are important developments in physics and technology of optical coatings. This paper will focus on the latest advances in the areas of new optical film systems and devices
new optical coating materials and film fabrication techniques
process control and monitoring
and different advanced applications. Particularly
focus is on optical films that combine optical design with microstructural features tailored on the nanometer and micrometer scales. Evaluation of film stability and integrity in harsh industrial environments and their compatibility with organic polymers are important as well.
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references
. Norbert Kaiser, Hans K. Pulker (Eds.). Optical interference coatings[J]. Springer Series in Optical Sciences,2003,88:
. S. Wilbrandt, R. Leitel, D. G bler, O. Stenzel, N. Kaiser.In-situ broadband monitoring and characterization of optical coatings postervortrag auf der .OIC 2004,in Technical Digest,2004.
. O. Stenzel.New challenges in optical coating design .Advances in Solid State Physics, 2003:875-888.Springer-Verlag Berlin Heidelberg 2003.
. O. Stenzel. The physics of thin film optical spectra: an introduction . Springer Series in Surface Sience, Springer Verlag Berlin, 2005.
. U. Schulz.Coating on plastics,in s. b umer (Ed.): handbook of plastic optics[M]. Wiley-VCH (2005), ISBN: 3527404244.
. P. Munzert, U. Schulz, N. Kaiser.Transparent thermoplastic polymers in plasma-assisted coating processes[J].Surf. Coat. Technol., 2003,173-174, 1048-1052.
. U. Schulz, U.B. Schallenberg, N. Kaiser.Symmetrical periods in antireflective coatings for plastic optics[J].Appl. Opt.,2003,42:1346-1351.
. A.Kaless, U. Schulz, P. Munzert, N. Kaiser.NANO-motheye antireflection pattern by plasma treatment of polymers[M]. Surf. Coat. Technol, 2005.(in press, online available at www.sciencedirect.com)
. N. Kaiser, S. Yulin, T. Feigl, H. Bernitzki, H. Lauth.EUV and soft X-ray multilayer optics[J]. SPIE,2004,5250:109-118.
. T. Feigl, S. Yulin, W. Stckl, N. Kaiser, H. Bernitzki, H. Lauth: Large area sputtering system for EUVL optics .Proc. 2nd International EUVL Symposium, Sep 30 - Oct 2 2003, Antwerp, Belgium.
. S. Yulin, N. Benoit, T. Feigl, N. Kaiser.High-temperature MoSi2/Si and Mo/C/Si/C multilayer mirrors . Proc. 3rd International EUVL Symposium, Nov 1-4, 2004, Myiazaki, Japan.