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1. Friedrich-Schiller-Universit t Jena, Institut für Angewandte Physik, Max-Wien-Platz 1, 07743 Jena, Germany
2. Fraunhofer-Institut für Angewandte Optik und Feinmechanik, Albert-Einstein-Str. 7, D-07745 Jena, Germany
收稿日期:2005-06-06,
修回日期:2005-06-16,
网络出版日期:2005-08-30,
纸质出版日期:2005-08-30
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S. Wilbrandt, O. Stenzel, D. G bler, 等. A hybrid algorithm for reengineering the refractive index profile of inhomogeneous coatings from optical in-situ broadband monitoring data[J]. 光学精密工程, 2005,13(4):487-491.
S. Wilbrandt, O. Stenzel, D. G bler, et al. A hybrid algorithm for reengineering the refractive index profile of inhomogeneous coatings from optical in-situ broadband monitoring data[J]. Optics and precision engineering, 2005, 13(4): 487-491.
S. Wilbrandt, O. Stenzel, D. G bler, 等. A hybrid algorithm for reengineering the refractive index profile of inhomogeneous coatings from optical in-situ broadband monitoring data[J]. 光学精密工程, 2005,13(4):487-491. DOI:
S. Wilbrandt, O. Stenzel, D. G bler, et al. A hybrid algorithm for reengineering the refractive index profile of inhomogeneous coatings from optical in-situ broadband monitoring data[J]. Optics and precision engineering, 2005, 13(4): 487-491. DOI:
Reengineering the refractive index profile of inhomogeneous coatings is a troublesome task. Multiplicity of solutions may significantly reduced by providing additional information. For this reason an in-situ broadband monitoring system was developed to measure the transmittance of the growing film directly at the rotating substrate. For characterization of these coatings
a new model was developed
which significantly reduces the number of parameters. The refractive index profile may be described by a proper number of equally spaced volume fraction values using the Bruggeman effective media approach. A good initial approximation of the refractive index profile can be generated based on deposition rates for both materials recorded with quartz crystal monitor during manufacturing. During the optimization process
a second order minimization algorithm was used to vary the refractive index profile of the whole coating and film thickness of the intermediate stages. Finally
a significantly improved accuracy of the modelled transmittance was achieved.
Reengineering the refractive index profile of inhomogeneous coatings is a troublesome task. Multiplicity of solutions may significantly reduced by providing additional information. For this reason an in-situ broadband monitoring system was developed to measure the transmittance of the growing film directly at the rotating substrate. For characterization of these coatings
a new model was developed
which significantly reduces the number of parameters. The refractive index profile may be described by a proper number of equally spaced volume fraction values using the Bruggeman effective media approach. A good initial approximation of the refractive index profile can be generated based on deposition rates for both materials recorded with quartz crystal monitor during manufacturing. During the optimization process
a second order minimization algorithm was used to vary the refractive index profile of the whole coating and film thickness of the intermediate stages. Finally
a significantly improved accuracy of the modelled transmittance was achieved.
. V. Janicki, S. Wilbrandt, O. Stenzel, D. G bler, N. Kaiser, A.V. Tikhonravov, M.K. Trubetskov, T. Amotchkina. Hybrid optical coating design for omnidirectional antireflection purposes[J]. J.Opt.A: Pure Appl. Opt.,2005,(7):L1-L4.
. W.J. Gunning, R.L. Hall, F.J. Woodberry, W.H. Southwell, N.S. Gluck.Codeposition of continuous composizion rugate filters[J]. Appl.Opt.,1989,28:2945-2948.
. J.P. Heuer, J.P. Elben, R.L. Hall, W.J. Gunning. Scale-up considerations for codeposited gradient index optical thin film filters[J]. OIC,1992,15:122-124.
. P. Baumeister. Simulation of a rugate filter via a stepped-index dielectric multilayer[J].Appl.Opt.,1986,25:2644-2668.
. D.A.G. Bruggeman.Berechnung verschiedener physikalischer konstanten von heterogenen substanzen, insbesondere dielektrizit tskonstanten und leitf higkeiten der mischk rper aus isotropen substanzen[J]. Ann.Phys.,1935,25:636-664.
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