Investigation of high power laser coatings

SHAO Jian-da; FAN Zheng-xiu

doi:null

您当前的位置：

首页 >

文章列表页 >

Investigation of high power laser coatings

更新时间：2020-08-12

- Investigation of high power laser coatings
- Investigation of high power laser coatings
- 光学精密工程 2005年13卷第4期页码：471-479
- 作者机构：
  
  1. R&amp
  2. D Center for Optical Thin Film Coating Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences,Shanghai 201800, China
- 作者简介：
- 基金信息：
- DOI：
  中图分类号：
- 收稿日期：2005-06-06，
  
  修回日期：2005-06-16，
  
  网络出版日期：2005-08-30，
  
  纸质出版日期：2005-08-30
- 稿件说明：
移动端阅览
SHAO Jian-da, FAN Zheng-xiu. Investigation of high power laser coatings[J]. 光学精密工程, 2005,13(4):471-479.

SHAO Jian-da, FAN Zheng-xiu. Investigation of high power laser coatings[J]. Optics and precision engineering, 2005, 13(4): 471-479.
SHAO Jian-da, FAN Zheng-xiu. Investigation of high power laser coatings[J]. 光学精密工程, 2005,13(4):471-479. DOI：

SHAO Jian-da, FAN Zheng-xiu. Investigation of high power laser coatings[J]. Optics and precision engineering, 2005, 13(4): 471-479. DOI：

摘要

High laser-induced damage threshold and large aperture were focuses on the studies of high power laser coatings. This paper reports the research activities at our center. Several measures were developed for evaluating characters of laser damage

including determination of laser induced damage threshold and detection of absorption based on surface thermal lensing technique. Defect was deemed to be the initial source of laser damage

and was the main factor restricting the laser damage resistance of optical coatings. The contribution of several kinds of typical defects to laser damage was analyzed

and some deposition measures were adopted to control and eliminate the origin of defect. Furthermore

some post-treatment methods were also employed to alleviate the influence of the defect and to improve the laser damage resistance. Correction mask was introduced to improve the thickness uniformity

and the thickness uniformity can be amended to less than 1% in the range of

650 mm. Preliminary investigation related to surface deformation was also conducted.

Abstract

including determination of laser induced damage threshold and detection of absorption based on surface thermal lensing technique. Defect was deemed to be the initial source of laser damage

and was the main factor restricting the laser damage resistance of optical coatings. The contribution of several kinds of typical defects to laser damage was analyzed

and some deposition measures were adopted to control and eliminate the origin of defect. Furthermore

some post-treatment methods were also employed to alleviate the influence of the defect and to improve the laser damage resistance. Correction mask was introduced to improve the thickness uniformity

and the thickness uniformity can be amended to less than 1% in the range of

650 mm. Preliminary investigation related to surface deformation was also conducted.

关键词

Keywords

references

. T.W.Walker,A.H.Guenther,P.E.Nielsen.Pulsed laser-induced damage to thin-film optical coatings-part I:experimental[J]. IEEE J. Quantum Electron.,1981,QE-17(10):2041-2052.

. A.S.Epifanov,A.A.Manenkov,A.M.Prokhorov.Theory of avalanche ionization induced intransparent dielectrics by an electromagnetic field[J]. Sov. Phys. JETP.,1976,43(2):377-382.

. N.Bloembergen.Laser induced electric breakdown in solids[J]. IEEE. J. Quantum Electron.,1974,QE-10(3):375-386.

. R.W.Hopper,D.R.Uhlmann.Mechanism of inclusion damage in laser glass[J].Appl. Phys.,1970,41(10):4023-4037.

. C.J.Stolz,R.J.Tech,M.R.Kozlowski,et al.Comparison of nodular defect seed geometries from differen deposition techniques[J].SPIE,1996,2714:374-382.

. R.M.Wood. Laser damage in optical materials[M]. Adam Hilger Ltd.,Bristol & Boston,1986.

. M.R.Lange,McIver J K,Guenther A H.Pulsed laser damage in thin film coatings:fluorides and oxides[J]. Thin Solid Films.,1985,125(1-2):143-155.

. R.Chow,S.Falabella,G.E.Loomis,et al.Damage thresholds of fluoride multilayers at 355 nm[J].SPIE,1993,1848:312-321.

. J.H.Apfel.The preparation of optical coatings for fusion lasers[J].Thin Solid Films.,1980,73(1):167-168.

. N.Kaiser,H.Uhlig,U.B.Schallendberg,et al.Very high damage threshold Al2O3/SiO2 dielectic coatings for excimer lasers[J]. SPIE,1993,2114:325-334.

. Y.A.Zhao,W.D.Gao,J.D.Shao,et al.Roles of absorbing defects and structural defects in multilayer under single-shot and multi-shot laser radiation[J]. Appl. Sur. Sci.,2004,227(1-4):275-281.

. M.Q.Zhan,H.B.He,Y.A.Zhao,et al.Overcoat dependence of laser-induced damage threshold of 355 nm HR coatings[J]. App. Sur. Sci. (In press)

. H.Y.Hu,Z.X.Fan,F.Luo.Laser-induced damage of a 1064 nm ZnS/MgF2 narrow-band interference filter[J]. Applied Optics-LP.,2001,40(12):1950-1956.

. D.Milam,W.H.Lowdermilk,F.Rainer.Influence of deposition parameters on laser-damage threshold of silica-tantala AR coatings[J]. Appl. Opt.,1982,21(20):3689-3694.

. J.Dijon,B.Rafin,C.Pelle,et al.One-hundred Joule per square centimeter 1.06 μm mirrors[J]. SPIE,1999,3902:158-168.

. D.W.Zhang,SH.H.Fan,Y.A.Zhao,et al.High laser-induced damage threshold HfO2 films prepared by ion-assisted electron beam evaporation[J]. Appl. Sur. Sci.,2005,243(1-4):232-237.

. H.Bercegol.What is laser conditioning:a review focusd on dielectric multilayers[J]. SPIE,1999,3578:421-427.

. Y.A.Zhao,T.Wang,D.W.Zhang,et al.Laser conditioning and multi-shot laser damage accumulation effects of HfO2/SiO2 antirelective coatings[J]. App. Sur. Sci.,2005,245(1-4):335-339.

. Y.A.Zhao,T.Wang,D.P.Zhang,et al.Laser conditioning of ZrO2:Y2O3/SiO2 mirror coatings prepared by E-beam evaporation[J]. App. Sur. Sci.,2005, 239(2):171-175.

. Y.A.Zhao,Y.J.Wang,H.Gong,et al.Annealing effects on structure and laser-induced damage threshold of Ta2O5/SiO2 dielectric mirrors[J]. Appl. Sur. Sci., 2003,210(3-4):353-358.

. G.L.Tian,J.B.Huang,T.Wang,et al.Microstructure and laser-induced damage threshold of ZrO2 coatings dependence on annealing temperature[J]. Appl. Sur. Sci.,2005, 239(2):201-208.

. ISO 11254-1.2. Lasers and laser-related equipment-Determination of laser-in duced damage threshold of optical surfaces-Part 1:1-on-1 test[S],2000.

. NASA reference publication 1395.Laser-induced damage threshold and certification procedures for optical materials[S].1997.

. P.K.Kuo,S.Y.Zhang.A new diffraction theory for the mirage effect and thermal lensing[J]. Progress in Natural Science,1996, 6:191-195.

. H.Y.Hu,Z.X.Fan,Q.Zhao.Measuring weak absorptance of thin film coatings by surface thermal lensing technique[J]. Laser Physics.,2000,10(2):633-681.

. S.H.Fan,H.B.He,J.D.Shao,et al.Absorption measurement for coatings using surface thermal lensing technique[J]. SPIE,2004,5774:531-534.

. D.P.Zhang,J.D.Shao,Y.A.Zhao,et al.Laser-induced damage threshold of ZrO2 thin films prepared at different oxygen partial pressures by e-beam evaporation[J]. J.Vac.Sci.Technol. A.,2005, 23(1):197-200.

. H.J.Cho,C.K.Hwangbo.Optical inhomogeneity and microstructure of ZrO2 thin films prepared by ion-assisted deposition[J]. Appl.Opt.,1996,35(28):5545-5552.

. J.C.Manifacier,J.Gasiot,J.P.Fillard.A simple method for the determination of the optical constants n,k,and the thickness of a weakly absorbing thin film[J]. J.Phys.E.1976,9(11):1002.

. D.P.Zhang,J.D.Shao,D.W.Zhang,et al.Employing oxygen plasma post-treatment to improve LIDT of ZrO2 films prepared by electron beam evaporation method[J]. Optics Letters.,2004,29(24):2870-2872.

浏览量

604

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

暂无数据