Performance of a serial-connection multi-chamber piezoelectric micropump

KAN Jun-wu; XUAN Ming; LIU Guo-jun; YANG Zhi-gang; WU Yi-hui

doi:null

您当前的位置：

首页 >

文章列表页 >

Performance of a serial-connection multi-chamber piezoelectric micropump

更新时间：2020-08-12

- Performance of a serial-connection multi-chamber piezoelectric micropump
- Performance of a serial-connection multi-chamber piezoelectric micropump
- 光学精密工程 2005年13卷第5期页码：535-541
- 作者机构：
  
  1. College of Mechanical Science and Engineering, Jilin University, Changchun 130025, China
  2. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130025, China
- 作者简介：
- 基金信息：
- DOI：
  中图分类号：
- 收稿日期：2005-04-16，
  
  修回日期：2005-06-27，
  
  网络出版日期：2005-10-30，
  
  纸质出版日期：2005-10-30
- 稿件说明：
移动端阅览
KAN Jun-wu, XUAN Ming, LIU Guo-jun, 等. Performance of a serial-connection multi-chamber piezoelectric micropump[J]. 光学精密工程, 2005,13(5):535-541.

KAN Jun-wu, XUAN Ming, LIU Guo-jun, et al. Performance of a serial-connection multi-chamber piezoelectric micropump[J]. Optics and precision engineering, 2005, 13(5): 535-541.
KAN Jun-wu, XUAN Ming, LIU Guo-jun, 等. Performance of a serial-connection multi-chamber piezoelectric micropump[J]. 光学精密工程, 2005,13(5):535-541. DOI：

KAN Jun-wu, XUAN Ming, LIU Guo-jun, et al. Performance of a serial-connection multi-chamber piezoelectric micropump[J]. Optics and precision engineering, 2005, 13(5): 535-541. DOI：

摘要

The concept and structure of serial-connection multi-chamber (SCMC) micropumps with cantilever valves is introduced. The SCMC micropump

which can be manufactured using conventional production techniques and materials

has a multi-layer circular planar structure. The border-upon piezoelectric actuators of a SCMC micropump work in anti-phase

as a result the pumping performance is similar to that of several single-chamber pumps running in series. The theoretical analysis shows that the pumping performance of a SCMC micropump depends not only on the characteristic and geometrical parameters of the piezoelectric actuators

but also on the number of pump chambers. Both flowrate and pressure of a SCMC pump can be enhanced to a certain extent. Four piezoelectric micropumps with different chambers were fabricated and tested. The testing results show that the enhancing extents of the flowrate and pressure of a SCMC piezoelectric micropump are different. The maximum flowrate and pressure of the four-chamber pump achieved are 2.5 times and 3.6 times those of the single-chamber pump achieved.

Abstract

The concept and structure of serial-connection multi-chamber (SCMC) micropumps with cantilever valves is introduced. The SCMC micropump

which can be manufactured using conventional production techniques and materials

has a multi-layer circular planar structure. The border-upon piezoelectric actuators of a SCMC micropump work in anti-phase

关键词

Keywords

references

. PETER W. Micropumps-summarizing the first two decades[J].SPIE, 2001, 4560: 39-52.

. JEONG O C,YANG S S. Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm [J]. Sensors and Actuators, 2000, 83: 249-255.

. FACAIS O,DUFOUR I. Dynamic simulation of an electrostatic micropump with pull-in and hysteresis phenomena [J]. Sensors and Actuators A, 1998, 70: 56-60.

. BOUROUINA T,BOSSEBOEUF A,GRANDCHAMP J P. Design and simulation of an electrostatic micropump for drug-delivery applications [J]. J. Micromech. Microeng, 1997,7: 186-188.

. JIANG T Y,NG T Y,LAM K Y. Dynamic analysis of an electrostatic micropump . Technical Proceedings of the MSM 2000 International Conference on Modeling and Simulation of Microsystems. San Diego, CA, USA, 2000, March 27-29.

. SPENCER W J,CORBETT W T,DOMINGUEZ L R, et al. An electronically controlled piezoelectric insulin pump and valves [J]. IEEE Trans. Sonics Ultrasonbics, 1978, SU-25(3):153-156.

. CAO L,MANTELL S,POLLA D. Design and simulation of an implantable medical drug delivery system using microelectromechanical systems technology . Sensors and Actuators A, 2001, 94:117-125.

. LINNEMANN R,WOIAS P,SENFFT C D, et al. A self-priming and bubble-tolerant piezoelectric silicon micropump for liquid and gases . Proc. of the 11th IEEE MEMS 1998 Technical Digest. Heidelberg, Germany, 1/25-29/98: 532-537.1998.

. RICHTER M,LINNEMANN R,WOIAS P. Robust design of gas and liquid micropumps [J]. Sensors and Actuators A, 1998, 68: 480-486.

. CUNNEEN J,LIN Y CH,CARAFFINI S,et al. A positive displacement micropump for microdialysis [J]. Mechatronics, 1998, (8): 561-583.

. KOCH M,HARRIS N,EVANS A G R, et al. A novel micromachined pump based on thick -film piezoelectric actuation [J]. Sensors and Actuators A, 1998,70:98-103.

. B HM S, OLTHUIS W,BERGVELD P. A plastic micropump constructed with conventional techniques and materials [J]. Sensors and Actuators, 1999, 77: 223-228.

. OLSSON A,ENOKSSON P,STEMME G, et al. A valve-less planar pump isotropically etched in silicon [J]. J. Micromech. Microeng., 1996, 6:87-91.

. KIM J H,KANG C J,KIM Y S. A disposable polydimethylsiloxane-based diffuser micropump actuated by piezoelectric disc [J]. J. Micromech. Microeng., 2004,71:119-124.

. SCHABMUELLER C G J,KOCH M,MOKHTARI M E,et al. Self-aligning gas/liquid micropump [J]. J. Micromech. Mcroeng, 2002, (12): 420-424.

. ZHANG J H,XIA Q X,WANG D K,, et al. Sampling theorem to periodic non-continuous signal from cavitation of piezoelectric pump [J]. Optics and Precision Engineering, 2002,10(5):446-482.

. MAKINO E ,MITSUYA T,SHIBATA T. Fabrication of TiNi shape memory micropump [J]. Sensors and Actuators A, 2001, 88:256-262.

. REYNAERTS D,PERIS J,BRUSSEL H V. An implantable drug-delivery system based on shape memory alloy micro-actuation [J]. Sensors and Actuators A, 1997,61 :455-462.

. HATCH A,KAMHOLZ A E,HOLMAN G, et al. A ferrofluidic magnetic micropump [J]. J. of Microelectromechanical Systems, 2001,10 (2):215-221.

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

暂无数据