微型压电泵系统的设计研究

杨树臣; 程光明; 刘国君; 刘建芳

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微型压电泵系统的设计研究

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- 微型压电泵系统的设计研究
- Design of piezoelectric micro-pump
- 光学精密工程 2005年13卷第3期页码：318-323
- 作者机构：
  
  吉林大学机械科学与工程学院,吉林长春,130025
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TH38;TN384
- 收稿日期：2005-03-22，
  
  修回日期：2005-04-08，
  
  网络出版日期：2005-06-30，
  
  纸质出版日期：2005-06-30
- 稿件说明：
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杨树臣, 程光明, 刘国君, 等. 微型压电泵系统的设计研究[J]. 光学精密工程, 2005,13(3):318-323.

YANG Shu-chen, CHENG Guang-ming, LIU Guo-jun, et al. Design of piezoelectric micro-pump[J]. Optics and precision engineering, 2005, 13(3): 318-323.
杨树臣, 程光明, 刘国君, 等. 微型压电泵系统的设计研究[J]. 光学精密工程, 2005,13(3):318-323. DOI：

YANG Shu-chen, CHENG Guang-ming, LIU Guo-jun, et al. Design of piezoelectric micro-pump[J]. Optics and precision engineering, 2005, 13(3): 318-323. DOI：

摘要

提出了一种整机采用迭片式结构

单向阀采用悬臂梁式薄片阀的新结构微型压电泵

设计、制作了实验用样机泵

设计了正弦信号发生器电路

将产生的正弦信号经过电压放大和功率放大后

作为该泵的电源驱动

通过对该泵的工作性能进行较为系统的实验测试和研究

提出了利用多腔体串联结构提高压电泵性能的优化设计方案。实验测试表明

该泵工作性能稳定(样机尺寸:

15 mm×1.8 mm;50 V正弦信号输入

80 Hz条件下

最大输出压力22 kPa

流量达到3.6 ml/min)。该泵的设计方法及所用制作工艺可用于研发大量生产的实用微型泵。

Abstract

This paper introduces a piezoelectric micro-pump with a new structure based on lamination

which adopts a cantilever check valve. In the laboratory the prototype pump has been designed and manufactured

the sine wave signal forming schematic circuit has been finished

which used to drive the micro pump after power amplification and voltage amplification. The systemic experiment research also has been done

the optimization project has been put forward

which adopts multi-chamber series connection structure to improve the performance of micro-pump. Through a series of experiments and tests

many beneficial conclusions have been drawn. the micro-pump possesses the stable work performance and owns higher ratio of performance to volume(the apparent dimension of pump:

15 mm×1.8 mm; the maximal low rate and backpressure of the micro-pump are about 3.6 ml/min and 22 kPa when applying 50 V sine wave driving voltage at 80 Hz). The structure and manufacture processing are useful for the design and development of the applied piezoelectric micro-pump.

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Keywords

references

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