Research and development of VUV optical coatings for micro mirror applications

Ming-hong Yang; Alexandre Gatto; Norbert Kaiser

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Research and development of VUV optical coatings for micro mirror applications

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- Research and development of VUV optical coatings for micro mirror applications
- Research and development of VUV optical coatings for micro mirror applications
- 光学精密工程 2005年13卷第4期页码：465-470
- 作者机构：
  
  Fraunhofer IOF, Albert-Einstein-Str. 7, D-07745 Jena, Germany
- 作者简介：
- 基金信息：
- DOI：
  中图分类号：
- 收稿日期：2005-06-06，
  
  修回日期：2005-06-16，
  
  网络出版日期：2005-08-30，
  
  纸质出版日期：2005-08-30
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Ming-hong Yang, Alexandre Gatto, Norbert Kaiser. Research and development of VUV optical coatings for micro mirror applications[J]. 光学精密工程, 2005,13(4):465-470.

Ming-hong Yang, Alexandre Gatto, Norbert Kaiser. Research and development of VUV optical coatings for micro mirror applications[J]. Optics and precision engineering, 2005, 13(4): 465-470.
Ming-hong Yang, Alexandre Gatto, Norbert Kaiser. Research and development of VUV optical coatings for micro mirror applications[J]. 光学精密工程, 2005,13(4):465-470. DOI：

Ming-hong Yang, Alexandre Gatto, Norbert Kaiser. Research and development of VUV optical coatings for micro mirror applications[J]. Optics and precision engineering, 2005, 13(4): 465-470. DOI：

摘要

This paper deals with vacuum UV optical coatings for micro mirror applications. High reflecting low-stress optical coatings have been developed for the next-generation of micro mechanical mirrors. The optimized metal systems are applicable in the VUV spectral region and can be integrated in the technology of MOEMS

such as spatial light modulators (SLM) and micro scanning mirrors.

Abstract

such as spatial light modulators (SLM) and micro scanning mirrors.

关键词

Keywords

references

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