A new type of three-finger micro-tweezer driven by electro-static force was developed for stable manipulation and assembly of micro devices. The whole system consists of micro-tweezers and a specially designed high frequency AC power supply. The free end of the fingers closes and opens with the increase and decrease of the voltage. The tweezers can grasp and manipulate micro objects at size from 30~100 μm. A quantitative simulation method based on boundarx element method(BEM) and equation of energy conservation is introduced to analyze the non-linear behaviors of the tweezer closure. The simulation results agree well with the experimental data.