Design and simulation of a tuning fork micromachined gyroscope with slide film damping

CHE Lu-feng; XIONG Bin; JIAO Ji-wei; WANG Yue-lin

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Design and simulation of a tuning fork micromachined gyroscope with slide film damping

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- Design and simulation of a tuning fork micromachined gyroscope with slide film damping
- Design and simulation of a tuning fork micromachined gyroscope with slide film damping
- 光学精密工程 2005年13卷第5期页码：519-524
- 作者机构：
  
  State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences Shanghai,China,200050
- 作者简介：
- 基金信息：
- DOI：
  中图分类号：
- 收稿日期：2005-06-06，
  
  修回日期：2005-06-16，
  
  网络出版日期：2005-10-30，
  
  纸质出版日期：2005-10-30
- 稿件说明：
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CHE Lu-feng, XIONG Bin, JIAO Ji-wei, 等. Design and simulation of a tuning fork micromachined gyroscope with slide film damping[J]. 光学精密工程, 2005,13(5):519-524.

CHE Lu-feng, XIONG Bin, JIAO Ji-wei, et al. Design and simulation of a tuning fork micromachined gyroscope with slide film damping[J]. Optics and precision engineering, 2005, 13(5): 519-524.
CHE Lu-feng, XIONG Bin, JIAO Ji-wei, 等. Design and simulation of a tuning fork micromachined gyroscope with slide film damping[J]. 光学精密工程, 2005,13(5):519-524. DOI：

CHE Lu-feng, XIONG Bin, JIAO Ji-wei, et al. Design and simulation of a tuning fork micromachined gyroscope with slide film damping[J]. Optics and precision engineering, 2005, 13(5): 519-524. DOI：

摘要

A novel tuning fork micromachined gyroscope

based on slide-film damping

is presented. The electrostatic driving gyroscope consists of two driving masses each of which supports one sensitive mass. The angular rate is sensed by the differential capacitances consisted of movable bar electrodes and fixed bar electrodes located on the glass wafer. The gyroscope can operate at atmospheric pressure with slide film damping in the driving and sensing directions

eliminate vacuum packaging and restrain cross-axis acceleration signal. The results of design and simulation show that the driving and sensing mode frequencies are 3 106 Hz and 3 175 Hz

respectively

and the

-values in driving and sensitive modes are 1 721 and 1 450 respectively. The design resolution is 0.025°/s.

Abstract

A novel tuning fork micromachined gyroscope

based on slide-film damping

eliminate vacuum packaging and restrain cross-axis acceleration signal. The results of design and simulation show that the driving and sensing mode frequencies are 3 106 Hz and 3 175 Hz

respectively

and the

-values in driving and sensitive modes are 1 721 and 1 450 respectively. The design resolution is 0.025°/s.

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Keywords

references

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