全息平面变间距光栅刻线弯曲程度分析

楼 俊; 徐向东; 刘 颖; 洪义麟; 付绍军; 何世平

doi:null

您当前的位置：

首页 >

文章列表页 >

全息平面变间距光栅刻线弯曲程度分析

更新时间：2020-08-12

- 全息平面变间距光栅刻线弯曲程度分析
- Study on line-profiles of variable line-space plane gratings with holographic recording
- 光学精密工程 2006年14卷第1期页码：12-15
- 作者机构：
  
  1. 中国科学技术大学国家同步辐射实验室, 安徽合肥 230029
  2. 中国科学技术大学力学与机械工程系,安徽合肥 230029
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： O436.1;O438.1
- 收稿日期：2005-07-20，
  
  修回日期：2005-10-24，
  
  网络出版日期：2006-02-20，
  
  纸质出版日期：2006-02-20
- 稿件说明：
移动端阅览
楼俊, 徐向东, 刘颖, 等. 全息平面变间距光栅刻线弯曲程度分析[J]. 光学精密工程, 2006,14(1):12-15.

LOU Jun, XU Xiang-dong, LIU Ying, et al. Study on line-profiles of variable line-space plane gratings with holographic recording[J]. Optics and precision engineering, 2006, 14(1): 12-15.
楼俊, 徐向东, 刘颖, 等. 全息平面变间距光栅刻线弯曲程度分析[J]. 光学精密工程, 2006,14(1):12-15. DOI：

LOU Jun, XU Xiang-dong, LIU Ying, et al. Study on line-profiles of variable line-space plane gratings with holographic recording[J]. Optics and precision engineering, 2006, 14(1): 12-15. DOI：

摘要

简述了全息变间距光栅的几何理论

研究了不同记录参数情况下的刻线弯曲程度。给出了用于评价光栅刻线弯曲程度的表达式

并推导出了它的积分形式

使计算效率提高了2~3倍。结果表明:球面波与非球面波干涉得到的光栅线条并不一定比球面波干涉得到的线条要平直。

Abstract

The geometric theory of aspheric wave-front recording optics was briefly described. The merit function of the curve tendency was derived. The integral expression of the merit function was also derived to improve the calculation efficiency. The calculation result shows that the latter efficiency is 2 to 3 times of the former. Design example of holographic VLS plane gratings is given to demonstrate the capability of our method

which indicates that the curve tendency is in very good agreement with the merit function.

关键词

Keywords

references

. 时轮,郝德阜. 变栅距衍射光栅的原理及应用[J]. 光学精密工程, 2001,9(3):284-287. SHI L, HAO D F. Theory and applications of varied line-space gratings[J].Optics and Precision Engineering,2001,9(3):284-287.(in Chinese) NAMIOKA T,KOIKE M. Aspheric wave-front recording optics for holographic gratings[J]. Appl. Opt., 1995,5,34(13):2180-2186. 朱向冰,何世平,付绍军,等. 云纹法检测变线距光栅的线密度[J]. 光学精密工程,2002,10(3):285-289. ZHU X B,HE SH P,FU SH J,et al. Measurement of the line-density of a varied -line-space grating by Moiré fringe[J].Optics and Precision Engineering,2002,10(3):285-289.(in Chinese) 陈锵,王秋平. 变间距光栅刻线密度的测试精度分析[J]. 核技术, 2001,24(7):557-563. CHENG Q, WANG Q P,et al. The groove density measurement of VLS plane grating by diffraction method[J].Nuclear Techniques,2001,24(7),557-563.(in Chinese) 陈锵,胡中文. 变间距光栅刻线密度测试系统的性能评价[J]. 核技术, 2004,27(1):9-13. CHENG Q,HU ZH W. Performance of a grating groove density measuring system by diffraction method[J].Nuclear Techiniques,2004,27(1):9-13.(in Chinese) PALMER C. Theory of second-generation holographic diffraction gratings[J]. JOSA .A, 1989,8,6(8):1175-1188. LOU J, LIU Y, FU SH J, et al. Design of variable line-space plane gratings with holographic recording[J].SPIE,2004,5636:551-559. KOIKE M,NAMIOKA T. Merit function for the design of grating instruments[J]. Appl. Opt., 1994,4,33(10):2048-2056. KOIKE M,NAMIOKA T. Plane gratings for high-resolution grazing-incidence monochromators: holographic grating versus mechanically ruled varied-line-spacing grating[J]. Appl. Opt., 1997,9,36(25):6308-6318. DEVILLE B,BONEMASON F,FLAMAND J,et al. Holographically recorded, ion etched variable line space gratings[J].SPIE,1998,3450:24-35. DUBAN M. Holographic aspheric gratings printed with aberrant waves[J]. Appl. Opt., 1987,10, 26(19):4263-4273. NODA H,NAMIOKA T,SEYA M.Geometric theory of the grating[J]. JOSA, 1974,64(8):1031-1036. NAMIOKA T,KOIKE M,CONTENT D. Geometric theory of the ellipsoidal grating[J]. Appl. Opt., 1994,11,33(31):7261-7274.

浏览量

483

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

小形变变形镜的设计及其在低像差脉冲压缩光栅中的应用

宽波段全息-离子束刻蚀光栅的设计及工艺

移频式全息光栅曝光干涉条纹锁定系统的设计

全息光栅制作中光栅掩模槽形形状随光刻胶特性曲线的演化规律

闪耀全息光栅离子束刻蚀工艺模拟及实验验证