非共轴掠入射X射线显微镜参数的误差分析

赵玲玲; 胡家升; 李 祥

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非共轴掠入射X射线显微镜参数的误差分析

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- 非共轴掠入射X射线显微镜参数的误差分析
- Error analysis on the parameters of non-coaxial grazing X-ray microscope
- 光学精密工程 2006年14卷第1期页码：34-42
- 作者机构：
  
  大连理工大学电子与信息工程学院,辽宁大连 116024
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TH742.63
- 收稿日期：2005-10-22，
  
  修回日期：2005-11-28，
  
  网络出版日期：2006-02-20，
  
  纸质出版日期：2006-02-20
- 稿件说明：
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赵玲玲, 胡家升, 李祥. 非共轴掠入射X射线显微镜参数的误差分析[J]. 光学精密工程, 2006,14(1):34-42.

ZHAO Ling-ling, HU Jia-sheng, Li Xiang. Error analysis on the parameters of non-coaxial grazing X-ray microscope[J]. Optics and precision engineering, 2006, 14(1): 34-42.
赵玲玲, 胡家升, 李祥. 非共轴掠入射X射线显微镜参数的误差分析[J]. 光学精密工程, 2006,14(1):34-42. DOI：

ZHAO Ling-ling, HU Jia-sheng, Li Xiang. Error analysis on the parameters of non-coaxial grazing X-ray microscope[J]. Optics and precision engineering, 2006, 14(1): 34-42. DOI：

摘要

设计了一套由4个反射镜组成的非共轴掠入射X射线显微镜

分析了该系统的像差和成像质量。为了研制出高质量的设备

需要制定合理的加工和装配公差。研究了由于元件和结构参数(反射镜的半径

物距

掠入射角等)的误差而引起的高斯参数和像差的变化。首次用点列图和调制传递函数来定量评价图像质量降低的程度

并在此基础上制定了合理的加工和装配公差。在这些公差的约束下

研制成一套非共轴掠入射X射线显微镜

在激光引爆的惯性约束聚变的诊断实验中

用该系统获得了高质量的图像。

Abstract

A set of non-coaxial grazing X-ray microscope consisting of four spherical mirrors was designed for diagnosis of ICF

and the aberrations and imaging quality of the microscope were analyzed. In order to acquire excellent image quality

It is necessary for manufacturing and assembling the microscope to set up the reasonable tolerances. In this paper

the changes of Gauss parameters and aberrations caused by component and subsystem parameters

such as the mirror's radius

the angle between mirrors

grazing angle

object distance

etc.

were studited

and the spot diagrams and MTF were firstly adopted for evaluating quantitatively image quality of the microscope. The reasonable manufacturing tolerances of components and assembly tolerances of the system were established based on the discussion and analysis above. A set of non-coaxial grazing X-ray microscope has been manufactured under confinement of the tolerances. In site test of ICF

the images with high resolution are obtained by the microscope.

关键词

Keywords

references

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. SAUNEUF R,DALMASSO J M,JALINAUD T,et al.Large-field high-resolution X-ray microscope for studying laser plasmas[J]. Rev. Sci. Instrum,1997,68(9):3412-3420.

. 胡家升,宋利民. 软X 射线多层膜设计中表面粗糙度对反射率的影响[J]. 光学精密工程,2004,12(4):380-385. HU J SH,SONG L M. Roughness effects on the reflectance in the design of a soft X-ray multi-layer mirror[J].Optics and Precision Engineering,2004,12(4):380-385.(in Chinese)

. 胡家升. 光学工程导论(第二版)[M]. 大连理工大学出版社,2005:829-864. HU J SH. Introduction to optical engineering (the second edition)[M].Dalian:Dalian University of Technology Press,2005:829-864.(in Chinese)

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