二自由度微定位平台的研制

田延岭; 张大卫; 闫 兵

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二自由度微定位平台的研制

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- 二自由度微定位平台的研制
- Development of a 2-DOF micropositioning table
- 光学精密工程 2006年14卷第1期页码：94-99
- 作者机构：
  
  1. 天津大学机械工程学院天津,300072
  2. 天津工程师范学院机械工程系天津,300222
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TH703
- 收稿日期：2005-09-21，
  
  修回日期：2005-11-18，
  
  网络出版日期：2006-02-20，
  
  纸质出版日期：2006-02-20
- 稿件说明：
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田延岭, 张大卫, 闫兵. 二自由度微定位平台的研制[J]. 光学精密工程, 2006,14(1):94-99.

TIAN Yan-ling, ZHANG Da-wei, YAN Bing. Development of a 2-DOF micropositioning table[J]. Optics and precision engineering, 2006, 14(1): 94-99.
田延岭, 张大卫, 闫兵. 二自由度微定位平台的研制[J]. 光学精密工程, 2006,14(1):94-99. DOI：

TIAN Yan-ling, ZHANG Da-wei, YAN Bing. Development of a 2-DOF micropositioning table[J]. Optics and precision engineering, 2006, 14(1): 94-99. DOI：

摘要

研制了一台压电陶瓷驱动和弹性铰链导向的一体化微定位平台

该微定位平台具有高刚度、高响应速度和高分辨率等优点。为了克服压电陶瓷驱动器伸长量较小的不足

采用杠杆放大机构增加微定位平台的位移输出。考虑驱动电路的影响

建立了微定位平台的机电耦合模型。通过试验研究了微定位平台的静动态特性

试验结果表明微定位平台的分辨率为5 nm

固有频率分别为143 Hz和180 Hz。该微定位平台可应用于纳米级的微定位。

Abstract

A piezoelectrically driven micropositioning table with high stiffness and resolution was presented. A flexure hinge mechanism was utilized to guide the moving part and to provide preload for the piezoelectric actuators. The lever amplifiers were used to enlarge the working range of the moving platform. The static and dynamic characteristics of the micropositioning table was investigated and its dynamic model was established for consideration of the driving circuit. From the experimental data

it is shows that the piezoelectrically driven micro-positioning table has a resolution of 5 nm and natural frequencies up to 143 Hz and 180 Hz

respectively

which indicates that the table is useful for nanometer level positioning applications.

关键词

Keywords

references

. ZHANG D W, TIAN Y L, GAO Y S. Development of a 3-DOF micropositioning workpiece table [J]. Chinese Journal of Mechanical Engineering, 2004, 17(1): 46-50.

. KIM J D, NAM S R. A piezoelectricaly driven micropositioning system for the ductile mode grinding of grinding materials [J]. Journal of Materials Processing Technology, 1997, 61(3): 310-319.

. GAO Y S, ZHANG D W, YU C W. Dynamic modeling of a novel workpiece table for active surface grinding control [J]. International Journal of Machine Tools and Manufacture,2001, 41(4): 609-624.

. 贾宏光, 吴一辉, 于振雷, 等. 压电驱动微位移工作台动态特性分析[J]. 光学精密工程, 2000, 8(5): 440-443. JIA H G, WU Y H, YU ZH L, et al. Dynamic characteristic analysis of the micropositioning system driven by PZT actuator [J]. Optics and Precision Engineering, 2000, 8(5): 440-443. (in Chinese)

. CHANG S H, TSENG C K, CHIEN H C. An ultra-precision XYθz piezo-micropositioner part I: design and analysis [J]. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 1999, 46(4): 897-905.

. CHANG S H, TSENG C K, CHIEN H C. An ultra-precision XYθz piezo-micropositioner part II: experiment and performance[J].IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control,1999,46(4):906-912.

. 刘品宽,孙立宁,曲东升,等. 新型二维纳米级微动工作台的动力学分析[J]. 光学精密工程,2002,10(2):143-147. LIU P K, SUN L N, QU D SH, et al. Dynamic analysis on a novel nanopositioning stage driven by PZT [J]. Optics and Precision Engineering, 2002, 10(2): 143-147. (in Chinese)

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