硅微光机械加速度地震检波器中 M-Z光波导干涉仪结构设计

张燕君; 吴 波; 崔宇明; 马广鹏

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硅微光机械加速度地震检波器中 M-Z光波导干涉仪结构设计

更新时间：2020-08-12

- 硅微光机械加速度地震检波器中 M-Z光波导干涉仪结构设计
- Structure design of Mach-Zehnder interferometer in electrooptic integrated acceleration seismic geophone
- 光学精密工程 2006年14卷第1期页码：77-82
- 作者机构：
  
  1. 天津大学精密仪器与光电子工程学院光电信息技术科学教育部重点实验室天津,300072
  2. 燕山大学信息科学与工程学院,河北秦皇岛,066004
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TH744.3
- 收稿日期：2005-09-10，
  
  修回日期：2005-10-21，
  
  网络出版日期：2006-02-20，
  
  纸质出版日期：2006-02-20
- 稿件说明：
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张燕君, 吴波, 崔宇明, 等. 硅微光机械加速度地震检波器中 M-Z光波导干涉仪结构设计[J]. 光学精密工程, 2006,14(1):77-82.

Structure design of Mach-Zehnder interferometer in electrooptic integrated acceleration seismic geophone[J]. Optics and precision engineering, 2006, 14(1): 77-82.
张燕君, 吴波, 崔宇明, 等. 硅微光机械加速度地震检波器中 M-Z光波导干涉仪结构设计[J]. 光学精密工程, 2006,14(1):77-82. DOI：

Structure design of Mach-Zehnder interferometer in electrooptic integrated acceleration seismic geophone[J]. Optics and precision engineering, 2006, 14(1): 77-82. DOI：

摘要

提出了一种新型的硅基M-Z干涉型光电集成加速度地震检波器。对硅基微光电机械加速度地震检波器的M-Z光波导干涉仪系统进行了系统研究和优化设计

采用K9玻璃作为基底层和包层材料

Bak7玻璃作为波导层材料

波导的宽度为4 μm

厚度为0.4 μm。M-Z光波导干涉仪的Y分支设计中采用上升反正弦S型弯曲

为适用于该干涉仪的信号臂和参考臂大跨距的特殊结构

应用波导转向镜实现了大角度光路转折

反射转向镜的内介质采用镀制金属铝膜得以实现

并利用BPM进行了仿真。为了防止TE模偏振光的偏振态经铝膜全反射后发生变化

加了4个长度为1 mm的TE模偏振器以保持其偏振态。实验结果与理论相符。

Abstract

A novel electrooptic integrated acceleration seismic geophone was presented. Mach-Zehnder waveguide interferometer of Si-based MOEMS (micro-opto-electro-mechanical system)acceleration seismic geophone was researched and its optimization structure design was accomplished. The material of buffer layer and coating layer is K9 glass. Two Bak7 glass Y-branching waveguides with width of 4 μm and thickness of 0.4 μm

and six guide mirrors are employed in interferometer. A S-shaped curve is used for the transition connecting two offset parallel waveguides in Y-branching. Because it is difficulty to make the branching angle large enough by using conventional Y-branching

a 90° directional change by a vertical mirror facet to realize the special structure between measuring arm and reference arm is designed. The inner dielectric film of the mirror facet is aluminum plating. To prevent the polarization state of TE mode polarized light from changing after passing through the aluminum film

4 polarizers with length of 1 mm have been used. The simulation results performed in BPM and the experiment agrees with the theoretical analysis well.

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references

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. 吴波,陈才和,丁桂兰,等. 迈克尔逊干涉型加速度地震检波器集成芯片[J]. 光电子·激光, 2003, 14(8): 791-794. WU B,CHEN C H,DING G L,et al. Structure design of M-Z interference MOEMS accelerometer[J].Journal of optoelectronics·Laser,2003,14(8):791-794.(in Chinese)

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