固体浸没透镜高密度光存储系统的焦深

张耀举; 陈俊峰

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固体浸没透镜高密度光存储系统的焦深

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- 固体浸没透镜高密度光存储系统的焦深
- Focal depth in high-density optical storage system with a solid immersion lens
- 光学精密工程 2006年14卷第3期页码：356-359
- 作者机构：
  
  温州大学物理与电子信息学院, 浙江温州 325027
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TH703;TP333.4
- 收稿日期：2005-08-22，
  
  修回日期：2006-04-18，
  
  网络出版日期：2006-06-30，
  
  纸质出版日期：2006-06-30
- 稿件说明：
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张耀举, 陈俊峰. 固体浸没透镜高密度光存储系统的焦深[J]. 光学精密工程, 2006,14(3):356-359.

Focal depth in high-density optical storage system with a solid immersion lens[J]. Optics and precision engineering, 2006, 14(3): 356-359.
张耀举, 陈俊峰. 固体浸没透镜高密度光存储系统的焦深[J]. 光学精密工程, 2006,14(3):356-359. DOI：

Focal depth in high-density optical storage system with a solid immersion lens[J]. Optics and precision engineering, 2006, 14(3): 356-359. DOI：

摘要

基于矢量衍射理论

分析和比较了两种等光程的半球形(h-SIL)和超半球形(s-SIL)固体浸没透镜的光场分布

计算了4种材料(玻璃

GaP

金刚石) SIL的焦深和光斑大小。结果表明:当数值孔径相同时

h-SIL的焦深较s-SIL的焦深大

焦深对SIL的折射率比较敏感

而光斑大小对波长照明比较敏感。h-SIL的焦深随透镜数值孔径的增加迅速单调减小

而s-SIL的焦深随透镜数值孔径的增加呈现出只一个周期的振荡行为。s-SIL对透镜的数值孔径要求较低

它更适合应用于高密度光存储和精密光刻。

Abstract

The optical field distributions for two types of aplanatic Solid Immerision Lenses(SILs) of hemisphere (h-SIL) and supersphere (s-SIL) were analyzed by using the vector diffraction theory. The focal depths and spot sizes of the SILs for four materials (glass

silicon

gallium-phosphide

and diamond) were simulated. The results show that the focal depth of the h-SIL is greater than that of the s-SIL. The focal depth of the system is sensitive to the refractive index of the SIL and the spot size is sensitive to the illuminating wavelength. As NA (numerical aperture of lens) increases

the focal depth of the h-SIL decreases rapidly and monotonously

whereas the focal depth of the s-SIL has a one-period-only oscillatory behavior. Compared with the h-SIL

the s-SIL has an advantage that it lowers the demands for large-NA lenses in some applications

so that it is preferable to the applications in high-density optical storage and subtle photolithography.

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Keywords

references

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