一种纳米级二维微定位工作台的设计与分析

孙立宁; 马 立; 荣伟彬; 高 燕

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一种纳米级二维微定位工作台的设计与分析

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- 一种纳米级二维微定位工作台的设计与分析
- Design and analysis on a 2-DOF nanopositioning stage
- 光学精密工程 2006年14卷第3期页码：406-411
- 作者机构：
  
  哈尔滨工业大学机器人研究所哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TH703.6
- 收稿日期：2005-07-13，
  
  修回日期：2005-12-26，
  
  网络出版日期：2006-06-30，
  
  纸质出版日期：2006-06-30
- 稿件说明：
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孙立宁, 马立, 荣伟彬, 等. 一种纳米级二维微定位工作台的设计与分析[J]. 光学精密工程, 2006,14(3):406-411.

SUN Li-Ning, MA Li, RONG Wei-bin, et al. Design and analysis on a 2-DOF nanopositioning stage[J]. Optics and precision engineering, 2006, 14(3): 406-411.
孙立宁, 马立, 荣伟彬, 等. 一种纳米级二维微定位工作台的设计与分析[J]. 光学精密工程, 2006,14(3):406-411. DOI：

SUN Li-Ning, MA Li, RONG Wei-bin, et al. Design and analysis on a 2-DOF nanopositioning stage[J]. Optics and precision engineering, 2006, 14(3): 406-411. DOI：

摘要

研究开发了一种采用柔性铰链导向的二维光学调整微定位工作台

建立了工作台的简化模型

并利用结构力学理论推导出工作台沿x、y方向刚度及前二阶固有频率解析式。进行了微定位工作台固有频率及沿

x、y方向刚度的试验测试

并

结合解析方法和有限元方法对微定位工作台设计刚度及动力特性进行分析验证。有限元分析表明:当工作台的直角平板柔性铰链长度较小而铰链宽度较大时

其刚度、频率及驱动力较高

铰链根部应力集中也较严重。通过改变柔性铰链的特征参数

可达到控制和优化工作台固有频率、输出位移、应力分布及驱动力响应的目的

并提出了一种优选微定位工作台柔性铰链参数的简易方法。

Abstract

A two-degree-of-freedom (2-DOF) flexure hinge guided-motion nanopositioning stage was developed to align optical system

and the simplified modeling of the nanopositioning stage was discussed. The

and

direction stiffness and two natural frequencies of the nanopositioning stage were deduced in terms of the theory of structural mechanics. Theoretical analysis and Finite Element Analysis(FEA) on static and dynamic behaviors of the nanopositioning stage were performed

the comparative results of the theory

FEA and experiments show the accuracy of theory model and the validity of FEA. FEA also indicates that the stiffness

natural frequency and driving force will increase with decreasing hinge length and increasing hinge width in despite of increasing the maximum stress of the stage. The experimental results also show that dimension modification is available to controlling and optimizing natural frequency

displacement

stresses

and force to achieve the desired response of the nanopositioning system. Finally

a simple procedure to optimize dimensions of the nanopositioning stage was given.

关键词

Keywords

references

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