机械刻划长焦距凹面金属光栅的研制

巴音贺希格; 高键翔; 齐向东

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机械刻划长焦距凹面金属光栅的研制

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- 机械刻划长焦距凹面金属光栅的研制
- Manufacturing for ruling concave metal grating with a long focal length
- 光学精密工程 2006年14卷第3期页码：391-395
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： O436.1
- 收稿日期：2005-09-28，
  
  修回日期：2006-02-22，
  
  网络出版日期：2006-06-30，
  
  纸质出版日期：2006-06-30
- 稿件说明：
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巴音贺希格, 高键翔, 齐向东. 机械刻划长焦距凹面金属光栅的研制[J]. 光学精密工程, 2006,14(3):391-395.

Bayinheshig, GAO Jian-xiang, QI Xiang-dong. Manufacturing for ruling concave metal grating with a long focal length[J]. Optics and precision engineering, 2006, 14(3): 391-395.
巴音贺希格, 高键翔, 齐向东. 机械刻划长焦距凹面金属光栅的研制[J]. 光学精密工程, 2006,14(3):391-395. DOI：

Bayinheshig, GAO Jian-xiang, QI Xiang-dong. Manufacturing for ruling concave metal grating with a long focal length[J]. Optics and precision engineering, 2006, 14(3): 391-395. DOI：

摘要

对大曲率半径(即长焦距)金属基底凹面光栅的机械刻划技术做了研究。为了刻制长焦距凹面光栅

设计和研制了弹性顶针式光栅刻划刀刀架

它具有适用于刻划平面光栅和长焦距凹面光栅的双重功能。给出了描述光栅刻划刀圆弧形刀刃曲率半径与凹面光栅曲率半径、光栅口径、金刚石刀头横向尺寸之间关系的数学表达式

理论分析了光栅刻划刀圆弧形刀刃曲率半径的取值范围

研制了10.6 μm激光系统用曲率半径为30 m的凹面金属光栅。检验结果表明

光栅的槽形质量较好

光栅的衍射效率可达96.8%以上。

Abstract

The ruling technique for concave metal grating with long curvature radius (namely long focal length) was studied. In order to rule the concave grating with a long focal length

a cutter frame with elastic thimble mode was designed and manufactured. It is available not only to plane grating

but also to concave grating with a long focal length. The mathematic expression of the relationship between the curvature radius of circular arc cutting edge of ruling tools for grating and the curvature radius of concave grating

the caliber of grating and the size of transverse direction of bit tool was given. The span of curvature radius of circular arc cutting edge was analyzed theoretically and the concave metal grating with curvature radius of 30 m for 10.6 μm laser system was manufactured. The testing results show that the quality of groove is preferable

and the diffraction efficiency is more than 96.8 percent.

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Keywords

references

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