悬臂梁阀单腔压电泵设计方法研究

赵明丽; 黄琴; 张玮; 李欣欣

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悬臂梁阀单腔压电泵设计方法研究

微纳技术与精密机械 | 更新时间：2020-08-12

- 悬臂梁阀单腔压电泵设计方法研究
- Investigation on design method of single chamber piezoelectric pump with cantilever valve
- 光学精密工程 2006年14卷第4期页码：607-611
- 作者机构：
  
  1. 吉林化工学院吉林,132022
  2. 吉林省产品质量监督检验院,吉林长春,130022
  3. 吉林大学, 吉林长春 130025
- 作者简介：
- 基金信息：
  
  国家863资助项目(No.2002AA404250)()
- DOI：
  中图分类号： TH38;TN384
- 收稿日期：2005-10-20，
  
  修回日期：2006-06-18，
  
  纸质出版日期：2006
- 稿件说明：
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赵明丽, 黄琴, 张玮, 李欣欣. 悬臂梁阀单腔压电泵设计方法研究[J]. 光学精密工程, 2006,14(4): 607-611

ZHAO Ming-li, HUANG Qin, ZHANG Wei, LI Xin-xin. Investigation on design method of single chamber piezoelectric pump with cantilever valve[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 607-611
赵明丽, 黄琴, 张玮, 李欣欣. 悬臂梁阀单腔压电泵设计方法研究[J]. 光学精密工程, 2006,14(4): 607-611 DOI：

ZHAO Ming-li, HUANG Qin, ZHANG Wei, LI Xin-xin. Investigation on design method of single chamber piezoelectric pump with cantilever valve[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 607-611 DOI：

摘要

给出了悬臂梁阀单腔压电泵的理论分析

根据压电振子与流体耦合的理论

建立了压电泵系统的动态模型。分析了流体质量、输出压力和系统阻尼对压电泵最佳工作频率的影响

认为减小腔体高度可以提高压电泵的最佳工作频率

提高压电泵的稳定性。通过分析压电振子结构参数对变形量的影响规律

确定了振子的最佳结构参数

认为压电陶瓷层与金属基板厚度比取0.45~0.55

直径比取0.8~0.9最佳。研究了压电泵出流形式对压电泵输出能力的影响

认为轴向出流有利于提高压电泵的输出能力。

Abstract

Based on hydro-solid coupling theory

the cantilever valve piezoelectic pump was comprehensively analyzed

and its dynamic model was established. After analysis of the interactions between hydro-mass

output pressure

system damp and working frequency

it is concluded that the decrease of chamber height will enhance the working frequency and stabilization. Then the vibrator structure parameters were confirmed through computing the influence law between vibrator structure parameter and amount of deformation. The conclusions show that the best thickness ratio is from 0.45 to 0.55 and the best diameter ratio is 0.8 to 0.9 between piezoelectric ceramic layer and the metal plate layer

respectively. The influence of the output form on the output ability also be considered

the result shows that axial output is in favor of the enhamement the output ability of the pump.

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Keywords

references

RICHTER M,LINNEMANN R,WOIAS P. Robust design of gas and liquid micro pumps [J]. Sensors and Actuators A,1998,68: 480-486.[2] FRANCAIS O,DUFOUR I. Dynamic simulation of an electrostatic micropump with pull-in and hysteresis phenomena[J]. Sensors and Actuators A,1988,70: 56-60.[3] ACCOTO D,CARROZZA M C,DARIO P.Modelling of micropumps using unimorph piezoelectric actuator and ball valves[J].J. Micromech. Microeng. 2000,10:277-281.[4] 阚君武,杨志刚,华顺明,等. 有阀压电薄膜泵性能研究[J]. 农业机械学报, 2003,34(5):84-87. KAN J W,YANG ZH G,HUA SH M,et al. Study on performance of a check-valved piezoelectric pump[J].Transactions of the Chinese society for agriculture machinery,2003,34(5):84-87.(in Chinese)[5] 阚君武,悬臂梁阀压电泵的设计理论与试验研究 . 吉林大学. KAN J W. The Design theory and experiemnt research on piezoelectric cantilever-valve micropump .Doctor thesis of Jilin University.(in Chinese)[6] 张也影.流体力学[M]. 北京:高等教育出版社. ZHANG Y Y. Hydrodynamic[M]. Beijing:Higher Education Press.(in Chinese)

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