&phi;124 mm口径碳化硅质非球面 镜面数控研抛技术研究

牛海燕; 张学军

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φ124 mm口径碳化硅质非球面镜面数控研抛技术研究

现代应用光学 | 更新时间：2020-08-12

- φ124 mm口径碳化硅质非球面镜面数控研抛技术研究
- Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror
- 光学精密工程 2006年14卷第4期页码：539-544
- 作者机构：
  
  1. 中国科学院长春光学精密机械与物理研究所光学技术研究中心,吉林长春,130031
  2. 中国科学院研究生院北京,100039
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助(No.60178037)。()
- DOI：
  中图分类号： TQ171.684
- 收稿日期：2005-09-22，
  
  修回日期：2006-06-18，
  
  纸质出版日期：2006
- 稿件说明：
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牛海燕, 张学军. φ124 mm口径碳化硅质非球面镜面数控研抛技术研究[J]. 光学精密工程, 2006,14(4): 539-544

NIU Hai-yan, ZHANG Xue-jun. Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 539-544
牛海燕, 张学军. φ124 mm口径碳化硅质非球面镜面数控研抛技术研究[J]. 光学精密工程, 2006,14(4): 539-544 DOI：

NIU Hai-yan, ZHANG Xue-jun. Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror[J]. Editorial Office of Optics and Precision Engineering, 2006,14(4): 539-544 DOI：

摘要

介绍了碳化硅质光学镜面的光学加工流程和加工手段

分析了碳化硅光学镜面的光学加工过程各个步骤中所应用的磨料和加工方法。利用自主研制的非球面数控加工中心

探索一种新型轮式研磨抛光技术

解决了中小口径非球面元件的数控加工问题

形成比较规范的中小口径碳化硅非球面元件加工方法

并应用到124 mm口径两面均为非球面的碳化硅元件的加工中

工件最终加工精度为第一面:0.761 (PV)、0.059 (RMS) (=0.632 8 m);第二面:0.834 (PV)、0.089 (RMS) (=0.632 8 m)

满足了设计要求。

Abstract

Based on 124 mm aspheric reaction-burned silicon carbide (RB-SiC) mirror

an aspheric computer controlled manufacturing center was designed

and an advanced wheeled polishing technology was developed to solve the problem of manufacturing and testing mid or small sized aspherics. The polishing equipment

abrasives and wheeled polishing technology were introduced. Some testing results of surface figure were given

it is showed that the first surface figure of the RB-SiC is 0.761 (PV) and 0.059 (RMS) (=0.632 8 m)

the second surface figure of the RB-SiC is 0.834 (PV) and 0.089 (RMS) (=0.632 8 m)

respectively.

关键词

Keywords

references

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关联资源

RB-SiC金刚石磨粒柔性刻划材料去除及表面损伤行为

空间RB-SiC反射镜的表面离子辅助镀硅改性技术

离子辅助制备碳化硅改性用硅膜的研究

一种中小口径非球面元件数控抛光技术

RB-SiC金刚石磨粒柔性刻划材料去除及表面损伤行为

φ124 mm口径碳化硅质非球面 镜面数控研抛技术研究

Research on computer controlled polishing technology of φ124 mm aspheric reaction-burned silicon carbide mirror

DOI：

摘要

Abstract

关键词

Keywords

references

φ124 mm口径碳化硅质非球面镜面数控研抛技术研究