A novel three-degree-of-freedom (3-DOF) nanopositioning stage was developed. The stage utilizes three piezoelectric actuators (PZTs) arranged in an equilateral triangle shape and ring plate hinges to realize nanopositioning for assuring smoothness of movement

negligible friction

negligible backlash and high precision. The simplified modeling of the nanopositioning stage was discussed. The translational stiffness along

z

direction and rotational stiffness along

x

and

y

direction

and three natural frequencies of the nanopositioning stage are deduced in terms of the theory of structural mechanics. Theoretical analysis and finite element analysis on static and dynamic behavior of the nanopositioning stage are performed. The comparative results of the theoretical analysis

finite element analysis (FEA) and experiments show the accuracy of theory model and the validity of FEA. FEA also indicates that the stiffness

the natural frequency and the driving force will increase with decreasing hinge radius and increasing hinge thickness despite the maximum stress increasing of the stage. By modificating the dimensions of a ring plane hinge it can control and optimize natural frequency

displacement

stresses

and driving force to achieve the desired response of the nanopositioning system. Finally

this paper gives a simple procedure to select the proper dimensions of a nanopositioning stage.