ZHOU Lian-qun, WU Yi-hui, ZHANG Ping, et al. Micro-spectrophotometer based on MEMS technology[J]. Optics and precision engineering, 2006, 14(6): 990-997.
ZHOU Lian-qun, WU Yi-hui, ZHANG Ping, et al. Micro-spectrophotometer based on MEMS technology[J]. Optics and precision engineering, 2006, 14(6): 990-997.DOI:
A new mini-spectrophotometer was developed by adopting micro-silicon-slit and micro-silicon- fixer
which are based on MEMS technology. Both the micro-silicon-slit and the micro-silicon-fixer have such feature as small volume
high precision
which are laid out and analyzed later. Meantime
by analysis of the sample cell’s optical characteristics which have some impact on the linearity of the spectrophotometer
a relation equation is put forward which is about the impact of the refractive index of the sample cell and the tested medium on the variety of the transmitted light intensity and the absorbency. When the water and the air are taken as referenced medium
the experiments demonstrate that the effect of different refractive of references doesn't influence the correlation coefficient r and the slope of the Absorbency-Concentration curve. The final results show that the new mini-spectrophotometer with micro-silicon-slit and micro-silicon- fixer is worked out
its correlation coefficient
r
>
0.999 and it's refractive index resolving power is better than 0.01.