精密测量中激光成像系统散斑的抑制因素

任淑艳; 张 琢; 刘国栋; 庄志涛; 浦昭邦

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精密测量中激光成像系统散斑的抑制因素

更新时间：2020-08-12

- 精密测量中激光成像系统散斑的抑制因素
- Restraining speckle of laser imaging system in accurate measurement
- 光学精密工程 2007年15卷第3期页码：331-336
- 作者机构：
  
  哈尔滨工业大学自动测试与控制系,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TN247
- 收稿日期：2007-01-22，
  
  修回日期：2007-02-04，
  
  网络出版日期：2007-06-30，
  
  纸质出版日期：2007-06-30
- 稿件说明：
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任淑艳, 张琢, 刘国栋, 等. 精密测量中激光成像系统散斑的抑制因素[J]. 光学精密工程, 2007,15(3):331-336.

REN Shu-Yan, ZHANG Zhuo, LIU Guo-Dong, et al. Restraining speckle of laser imaging system in accurate measurement[J]. Optics and precision engineering, 2007, 15(3): 331-336.
任淑艳, 张琢, 刘国栋, 等. 精密测量中激光成像系统散斑的抑制因素[J]. 光学精密工程, 2007,15(3):331-336. DOI：

REN Shu-Yan, ZHANG Zhuo, LIU Guo-Dong, et al. Restraining speckle of laser imaging system in accurate measurement[J]. Optics and precision engineering, 2007, 15(3): 331-336. DOI：

摘要

对采用激光照明的测量系统中散斑形成的三个重要因素

即入射光束的相干性、相位差和偏振特性进行了详细的理论分析

并给出了这些因素与散斑对比度的变化关系。计算表明

相干长度降到低于1 mm时

散斑对比度减小到0.5左右

得到的图像细节相对比较清楚

易于检测。基于计算分析

提出了相应的解决及优化方法

为抑制散斑、提高激光照明质量和测量准确性提供了理论依据。

Abstract

Three factors of restraining speckle noise in detection system

coherence

phase difference and polarization of the incident ray

were analyzed in detail

and the relations between these factors and speckle contrast were also presented. Calculation results show that when coherence length is less than 1 mm

speckle contrast is reduced to 0.5

which is advantageous to obtaining excellent measuring accuracy and keeping good details for a image. On the basis of theoretical analysis

the solution and optimization to reduce speckle was proposed to restrain speckle noise

improve illumination quality and enhance accuracy of measurement.

关键词

Keywords

references

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