Fabrication method and its key process points of the micro probes used in ICs or semiconductors were analyzed. The processes of nickel soft contact microprobes produced by UV-LIGA were introduced. By analyzing on its fabricating keys and optimizing the experimental process parameters of some key fabrication steps

a kind of nickel soft contact microprobe was fabricated. The experimental results show that nickel soft contact microprobe has total length of 4 mm

width of 80 μm

and height of 100 μm. Radius of curvature of the tip is less than 5 μm and the high-to wide ratio(100 μm∶20 μm) of spring is 5. The micro probes with appropriate dimensional accuracy

good appearance quality and less drawbacks can be fabricated relatively economically based on the optimized process conditions (before-exposure bake: 60 ℃

120 min

90 ℃

120 min; exposure: high level of exposure energy; post-exposure bake: 65 ℃

10 min

95 ℃

45 min; accessorial measurements: ultrasonic stirring developing

placing in air

cooling resist with stove closed) of UV- LIGA.