A new optimized structure of micro electromagnetic relay was introduced

and its working principle was presented. By analysis of the driving force and the displacement of the armature

a three-dimensional structure was designed to increase the efficiency of magnetic circuit. A prototype micro electromagnetic relay with dimension of 5 mm×5 mm×1 mm was fabricated based on the MEMS fabrication process. The micro relay consist of a magnetic circuit

an excitation planar coil

a fixed contact pad and a permalloy cantilever (armature). Experimental result shows that when the micro electromagnetic relay in the resistance of the excitation coil of 20 Ω works at 5 V

its contact resistance is 14.5 Ω and respond time is about 1 ms under the electromagnetic actuation.