A high speed fabrication technique based on two-photon polymerization is proposed for fabricating three-dimensional (3D) microstructures and its spatial fabrication resolution is also studied. Based on the study of high speed scanning

a microfabrication system assembled a set of galvano mirrors and 1D PZT stage is established

and the jump and mark moving mode is used in this fabrication system with line by line scanning mode for improving fabrication speed. Two different kind of structures(a microscaled swift horse and a log-pile photonic crystal) are fabricated in experiments. Experimental results indicate that the fabrication speed can be improved 10 or 1 000 times than that method based on point by point scanning mode. The experimental results also reveal that the spatial fabrication resolution can be improved efficiently with shortening the exposure time under a fixed laser power

and the highest spatial fabrication resolution is achieved as 50 nm

which is higher than the highest resolution of 100 nm published in literatures. With high speed and excellent spatial resolution of fabrication

this technique is a powerful tool for micro/nano parts used for photonic devices and MEMS.