The structure and working principle of a inchworm-type piezoelectric linear actuator are analyzed

and the mechanical system dynamic modal of the actuator is established. Based on the analysis of the actuator's stator

the output performance of proposed actuator is analyzed

experimental results show that the output displacement of the actuator is stable

and the displacement for single step is 9.8 μm when the actuating voltage is 100 V. The velocity and acceleration properties of the linear actuator are tested. According to the testing results

the dynamic response performance of the actuator is analyzed deeply. The experimental results show that the proposed piezoelectric linear actuator has good dynamic performance and motion stability.