A new method for building and transferring chamber center reference system for the target of Inertial Confinement Fusion(ICF) was put forward

and three sets of optical vision monitor instruments with autocollimating and microscope functions were designed and investigated. And then

the working principle and optic design were presented. Finally

the calibration method and testing results were given. The analysis results indicate that the precision of the monitoring system is above ±3.28 μm. Experimental results prove that the method of building and transferring coordinate reference system are easy to carry out and keep a high accuracy. It can satisfy the system requirements of leading physical-test target to the center of target chamber.