A new nonlinear mathematical model descripting the comparability between minor loop curves and mean loop curves of the PZT actuator was establised. With the model

the minor loop curves can be expressed by multiplying each point while the mean loop curves by a sequential factor. The maximum relatively errors of the model are 1.2% in ascending curves and 2% in descending curves respectively. A new PID complex control arithmetic to the PZT actuator was setup referencing feed-forward loop. The experimental results show that 280 Hz closed loop bandwidth is available with 4 μm peak-to-peak input

and the band width is 30% wider than that of a general PID feedback control arithmetic.